Advanced semiconductor fabrication handbook:
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Scottsdale, Ariz.
Integrated Circuit Engineering
1998
|
| Subjects: | |
| Physical Description: | Getr. Zählung Ill., graph. Darst. CD-ROM (12 cm) |
| ISBN: | 1877750700 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV013241310 | ||
| 003 | DE-604 | ||
| 005 | 20001013 | ||
| 007 | t | ||
| 008 | 000710s1998 ad|| |||| 00||| eng d | ||
| 020 | |a 1877750700 |9 1-877750-70-0 | ||
| 035 | |a (OCoLC)40433813 | ||
| 035 | |a (DE-599)BVBBV013241310 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 100 | 1 | |a Shon-Roy, Lita |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Advanced semiconductor fabrication handbook |c authors: Lita Shon-Roy ; Allan Wiesnoski ; Robert Zorich |
| 264 | 1 | |a Scottsdale, Ariz. |b Integrated Circuit Engineering |c 1998 | |
| 300 | |a Getr. Zählung |b Ill., graph. Darst. |e CD-ROM (12 cm) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Semiconductors |x Design and construction |v Handbooks, manuals, etc | |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Wiesnoski, Allan |e Verfasser |4 aut | |
| 700 | 1 | |a Zorich, Robert |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009023828 | ||
Record in the Search Index
| _version_ | 1804128001702494208 |
|---|---|
| any_adam_object | |
| author | Shon-Roy, Lita Wiesnoski, Allan Zorich, Robert |
| author_facet | Shon-Roy, Lita Wiesnoski, Allan Zorich, Robert |
| author_role | aut aut aut |
| author_sort | Shon-Roy, Lita |
| author_variant | l s r lsr a w aw r z rz |
| building | Verbundindex |
| bvnumber | BV013241310 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4100 |
| ctrlnum | (OCoLC)40433813 (DE-599)BVBBV013241310 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01326nam a2200385 c 4500</leader><controlfield tag="001">BV013241310</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20001013 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000710s1998 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1877750700</subfield><subfield code="9">1-877750-70-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)40433813</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013241310</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Shon-Roy, Lita</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Advanced semiconductor fabrication handbook</subfield><subfield code="c">authors: Lita Shon-Roy ; Allan Wiesnoski ; Robert Zorich</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Scottsdale, Ariz.</subfield><subfield code="b">Integrated Circuit Engineering</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield><subfield code="b">Ill., graph. Darst.</subfield><subfield code="e">CD-ROM (12 cm)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield><subfield code="v">Handbooks, manuals, etc</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wiesnoski, Allan</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zorich, Robert</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009023828</subfield></datafield></record></collection> |
| id | DE-604.BV013241310 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:18Z |
| institution | BVB |
| isbn | 1877750700 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009023828 |
| oclc_num | 40433813 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | Getr. Zählung Ill., graph. Darst. CD-ROM (12 cm) |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Integrated Circuit Engineering |
| record_format | marc |
| spelling | Shon-Roy, Lita Verfasser aut Advanced semiconductor fabrication handbook authors: Lita Shon-Roy ; Allan Wiesnoski ; Robert Zorich Scottsdale, Ariz. Integrated Circuit Engineering 1998 Getr. Zählung Ill., graph. Darst. CD-ROM (12 cm) txt rdacontent n rdamedia nc rdacarrier Semiconductors Design and construction Handbooks, manuals, etc Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Wiesnoski, Allan Verfasser aut Zorich, Robert Verfasser aut |
| spellingShingle | Shon-Roy, Lita Wiesnoski, Allan Zorich, Robert Advanced semiconductor fabrication handbook Semiconductors Design and construction Handbooks, manuals, etc Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4022993-2 |
| title | Advanced semiconductor fabrication handbook |
| title_auth | Advanced semiconductor fabrication handbook |
| title_exact_search | Advanced semiconductor fabrication handbook |
| title_full | Advanced semiconductor fabrication handbook authors: Lita Shon-Roy ; Allan Wiesnoski ; Robert Zorich |
| title_fullStr | Advanced semiconductor fabrication handbook authors: Lita Shon-Roy ; Allan Wiesnoski ; Robert Zorich |
| title_full_unstemmed | Advanced semiconductor fabrication handbook authors: Lita Shon-Roy ; Allan Wiesnoski ; Robert Zorich |
| title_short | Advanced semiconductor fabrication handbook |
| title_sort | advanced semiconductor fabrication handbook |
| topic | Semiconductors Design and construction Handbooks, manuals, etc Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Semiconductors Design and construction Handbooks, manuals, etc Fertigung Halbleiter |
| work_keys_str_mv | AT shonroylita advancedsemiconductorfabricationhandbook AT wiesnoskiallan advancedsemiconductorfabricationhandbook AT zorichrobert advancedsemiconductorfabricationhandbook |