Ion beams in materials processing and analysis:
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Vienna
Springer
2013
|
Schlagworte: | |
Online-Zugang: | UBT01 Volltext Inhaltsverzeichnis Abstract |
Beschreibung: | 1 Online-Ressource |
ISBN: | 9783211993552 9783211993569 |
DOI: | 10.1007/978-3-211-99356-9 |
Internformat
MARC
LEADER | 00000nmm a2200000 c 4500 | ||
---|---|---|---|
001 | BV040724909 | ||
003 | DE-604 | ||
005 | 20161124 | ||
007 | cr|uuu---uuuuu | ||
008 | 130205s2013 |||| o||u| ||||||eng d | ||
020 | |a 9783211993552 |9 978-3-211-99355-2 | ||
020 | |a 9783211993569 |c Online |9 978-3-211-99356-9 | ||
024 | 7 | |a 10.1007/978-3-211-99356-9 |2 doi | |
035 | |a (OCoLC)827053973 | ||
035 | |a (DE-599)HBZTT050417812 | ||
040 | |a DE-604 |b ger |e rakwb | ||
041 | 0 | |a eng | |
049 | |a DE-703 | ||
082 | 0 | 4 | |a 620.11295 |2 23 |
082 | 0 | 4 | |a 620.11297 |2 23 |
084 | |a ZM 8050 |0 (DE-625)157144: |2 rvk | ||
100 | 1 | |a Schmidt, Bernd |d 1948- |e Verfasser |0 (DE-588)1034403788 |4 aut | |
245 | 1 | 0 | |a Ion beams in materials processing and analysis |c Bernd Schmidt ; Klaus Wetzig |
264 | 1 | |a Vienna |b Springer |c 2013 | |
300 | |a 1 Online-Ressource | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
650 | 4 | |a Electronics | |
650 | 4 | |a Optical materials | |
650 | 0 | 7 | |a Werkstoffkunde |0 (DE-588)4079184-1 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenstrahlanalyse |0 (DE-588)4569698-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenstrahlbearbeitung |0 (DE-588)4277034-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenstrahl |0 (DE-588)4162347-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Werkstoffprüfung |0 (DE-588)4037934-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Materialbearbeitung |0 (DE-588)4139082-9 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Werkstoff |0 (DE-588)4065579-9 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Werkstoff |0 (DE-588)4065579-9 |D s |
689 | 0 | 1 | |a Materialbearbeitung |0 (DE-588)4139082-9 |D s |
689 | 0 | 2 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 0 | 3 | |a Ionenstrahlbearbeitung |0 (DE-588)4277034-8 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Werkstoff |0 (DE-588)4065579-9 |D s |
689 | 1 | 1 | |a Werkstoffprüfung |0 (DE-588)4037934-6 |D s |
689 | 1 | 2 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 1 | 3 | |a Ionenstrahlanalyse |0 (DE-588)4569698-6 |D s |
689 | 1 | |5 DE-604 | |
689 | 2 | 0 | |a Werkstoffkunde |0 (DE-588)4079184-1 |D s |
689 | 2 | 1 | |a Ionenstrahlanalyse |0 (DE-588)4569698-6 |D s |
689 | 2 | 2 | |a Ionenstrahlbearbeitung |0 (DE-588)4277034-8 |D s |
689 | 2 | |8 1\p |5 DE-604 | |
700 | 1 | |a Wetzig, Klaus |e Verfasser |4 aut | |
856 | 4 | 0 | |u https://doi.org/10.1007/978-3-211-99356-9 |x Verlag |3 Volltext |
856 | 4 | 2 | |m Springer Fremddatenuebernahme |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
856 | 4 | 2 | |m Springer Fremddatenuebernahme |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |3 Abstract |
912 | |a ZDB-2-CMS | ||
999 | |a oai:aleph.bib-bvb.de:BVB01-025705041 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
966 | e | |u https://doi.org/10.1007/978-3-211-99356-9 |l UBT01 |p ZDB-2-CMS |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1804150036432420864 |
---|---|
adam_text | ION BEAMS IN MATERIALS PROCESSING AND ANALYSIS
/ SCHMIDT, BERND
: 2013
TABLE OF CONTENTS / INHALTSVERZEICHNIS
PREFACE
1. INTRODUCTION
2. ION- SOLID INTERACTIONS
2.1 FUNDAMENTAL PRINCIPLES
2.2 BINARY ELASTIC COLLISIONS
2.3 ION STOPPING
2.4 ION CHANNELING
2.5 ION INDUCED TARGET MODIFICATIONS
3. ION BEAM TECHNOLOGY
3.1 PRINCIPLES OF ION ACCELERATORS
3.2 ION SOURCES
3.3 ION ACCELERATION
3.4 ION BEAM HANDLING
3.5 ION IMPLANTATION SYSTEMS
3.6 ELECTROSTATIC ION ACCELERATOR SYSTEMS
3.7 FOCUSED ION BEAM SYSTEMS
4. MATERIALS PROCESSING
4.1 ION IRRADIATION EFFECTS IN CRYSTALLINE MATERIALS
4.2 ION IMPLANTATION INTO SEMICONDUCTORS
4.3 ION BEAM SYNTHESIS OF NEW PHASES IN SOLIDS
4.4 ION BEAM MIXING OF INTERFACES
4.5 ION BEAM SLICING OF THIN LAYERS (SMART-CUT FOR SOI AND SOLAR CELLS)
4.6 ION BEAM EROSION, SPUTTERING AND SURFACE PATTERNING (RIPPLES AND
DOTS)
4.7 ION BEAM SHAPING OF NANOMATERIALS
4.8 ION BEAM PROCESSING OF OTHER MATERIALS
5. ION BEAM PREPARATION OF MATERIALS
5.1 REMOVAL OF TARGET ATOMS BY SPUTTERING
5.2 EFFECTS ON SPUTTERING YIELD
5.3 PREPARATION STEPS BY ION BEAM IRRADIATION
5.4 FOCUS ION BEAM (FIB) PREPARATION
6. ION BEAM ANALYSIS BY ION BEAMS
6.1 INTRODUCTION
6.2 ION BEAM ANALYTICAL TECHNIQUES – A SURVEY
6.3 ION BEAM SCATTERING TECHNIQUES
6.4 ION BEAM INDUCED PHOTON EMISSION
6.5 NUCLEAR REACTION ANALYSIS (NRA)
6.6 ION BEAM INDUCED ELECTRON AND LIGHT EMISSION
6.7 SECONDARY ION EMISSION
6.8 ION BEAM IMAGING TECHNIQUES
7. SPECIAL ION BEAM APPLICATIONS IN MATERIALS ANALYSIS PROBLEMS
7.1 FUNCTIONAL THIN FILMS AND LAYERS
7.2 ION BEAM ANALYSIS IN ART AND ARCHEOMETRY
7.3 SPECIAL APPLICATIONS IN LIFE SCIENCES
INDEX
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
ION BEAMS IN MATERIALS PROCESSING AND ANALYSIS
/ SCHMIDT, BERND
: 2013
ABSTRACT / INHALTSTEXT
A COMPREHENSIVE REVIEW OF ION BEAM APPLICATION IN MODERN MATERIALS
RESEARCH IS PROVIDED, INCLUDING THE BASICS OF ION BEAM PHYSICS AND
TECHNOLOGY. THE PHYSICS OF ION-SOLID INTERACTIONS FOR ION IMPLANTATION,
ION BEAM SYNTHESIS, SPUTTERING AND NANO-PATTERNING IS TREATED IN DETAIL.
ITS APPLICATIONS IN MATERIALS RESEARCH, DEVELOPMENT AND ANALYSIS,
DEVELOPMENTS OF SPECIAL TECHNIQUES AND INTERACTION MECHANISMS OF ION
BEAMS WITH SOLID STATE MATTER RESULT IN THE OPTIMIZATION OF NEW MATERIAL
PROPERTIES, WHICH ARE DISCUSSED THOROUGHLY. SOLID-STATE PROPERTIES
OPTIMIZATION FOR FUNCTIONAL MATERIALS SUCH AS DOPED SEMICONDUCTORS AND
METAL LAYERS FOR NANO-ELECTRONICS, METAL ALLOYS, AND NANO-PATTERNED
SURFACES IS DEMONSTRATED. THE ION BEAM IS AN IMPORTANT TOOL FOR BOTH
MATERIALS PROCESSING AND ANALYSIS. RESEARCHERS ENGAGED IN SOLID-STATE
PHYSICS AND MATERIALS RESEARCH, ENGINEERS AND TECHNOLOGISTS IN THE FIELD
OF MODERN FUNCTIONAL MATERIALS WILL WELCOME THIS TEXT
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
|
any_adam_object | 1 |
author | Schmidt, Bernd 1948- Wetzig, Klaus |
author_GND | (DE-588)1034403788 |
author_facet | Schmidt, Bernd 1948- Wetzig, Klaus |
author_role | aut aut |
author_sort | Schmidt, Bernd 1948- |
author_variant | b s bs k w kw |
building | Verbundindex |
bvnumber | BV040724909 |
classification_rvk | ZM 8050 |
collection | ZDB-2-CMS |
ctrlnum | (OCoLC)827053973 (DE-599)HBZTT050417812 |
dewey-full | 620.11295 620.11297 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.11295 620.11297 |
dewey-search | 620.11295 620.11297 |
dewey-sort | 3620.11295 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Werkstoffwissenschaften / Fertigungstechnik |
doi_str_mv | 10.1007/978-3-211-99356-9 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03004nmm a2200673 c 4500</leader><controlfield tag="001">BV040724909</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20161124 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">130205s2013 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783211993552</subfield><subfield code="9">978-3-211-99355-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783211993569</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-211-99356-9</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-211-99356-9</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)827053973</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)HBZTT050417812</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620.11295</subfield><subfield code="2">23</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620.11297</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 8050</subfield><subfield code="0">(DE-625)157144:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Schmidt, Bernd</subfield><subfield code="d">1948-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1034403788</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion beams in materials processing and analysis</subfield><subfield code="c">Bernd Schmidt ; Klaus Wetzig</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Vienna</subfield><subfield code="b">Springer</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Werkstoffkunde</subfield><subfield code="0">(DE-588)4079184-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahlanalyse</subfield><subfield code="0">(DE-588)4569698-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahlbearbeitung</subfield><subfield code="0">(DE-588)4277034-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Werkstoffprüfung</subfield><subfield code="0">(DE-588)4037934-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Materialbearbeitung</subfield><subfield code="0">(DE-588)4139082-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Werkstoff</subfield><subfield code="0">(DE-588)4065579-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Werkstoff</subfield><subfield code="0">(DE-588)4065579-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Materialbearbeitung</subfield><subfield code="0">(DE-588)4139082-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Ionenstrahlbearbeitung</subfield><subfield code="0">(DE-588)4277034-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Werkstoff</subfield><subfield code="0">(DE-588)4065579-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Werkstoffprüfung</subfield><subfield code="0">(DE-588)4037934-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="3"><subfield code="a">Ionenstrahlanalyse</subfield><subfield code="0">(DE-588)4569698-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Werkstoffkunde</subfield><subfield code="0">(DE-588)4079184-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Ionenstrahlanalyse</subfield><subfield code="0">(DE-588)4569698-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="2"><subfield code="a">Ionenstrahlbearbeitung</subfield><subfield code="0">(DE-588)4277034-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wetzig, Klaus</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-211-99356-9</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Springer Fremddatenuebernahme</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Springer Fremddatenuebernahme</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Abstract</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-CMS</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-025705041</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-211-99356-9</subfield><subfield code="l">UBT01</subfield><subfield code="p">ZDB-2-CMS</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV040724909 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T00:32:32Z |
institution | BVB |
isbn | 9783211993552 9783211993569 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025705041 |
oclc_num | 827053973 |
open_access_boolean | |
owner | DE-703 |
owner_facet | DE-703 |
physical | 1 Online-Ressource |
psigel | ZDB-2-CMS |
publishDate | 2013 |
publishDateSearch | 2013 |
publishDateSort | 2013 |
publisher | Springer |
record_format | marc |
spelling | Schmidt, Bernd 1948- Verfasser (DE-588)1034403788 aut Ion beams in materials processing and analysis Bernd Schmidt ; Klaus Wetzig Vienna Springer 2013 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Electronics Optical materials Werkstoffkunde (DE-588)4079184-1 gnd rswk-swf Ionenstrahlanalyse (DE-588)4569698-6 gnd rswk-swf Ionenstrahlbearbeitung (DE-588)4277034-8 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Werkstoffprüfung (DE-588)4037934-6 gnd rswk-swf Materialbearbeitung (DE-588)4139082-9 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf Werkstoff (DE-588)4065579-9 s Materialbearbeitung (DE-588)4139082-9 s Ionenstrahl (DE-588)4162347-2 s Ionenstrahlbearbeitung (DE-588)4277034-8 s DE-604 Werkstoffprüfung (DE-588)4037934-6 s Ionenstrahlanalyse (DE-588)4569698-6 s Werkstoffkunde (DE-588)4079184-1 s 1\p DE-604 Wetzig, Klaus Verfasser aut https://doi.org/10.1007/978-3-211-99356-9 Verlag Volltext Springer Fremddatenuebernahme application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis Springer Fremddatenuebernahme application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA Abstract 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Schmidt, Bernd 1948- Wetzig, Klaus Ion beams in materials processing and analysis Electronics Optical materials Werkstoffkunde (DE-588)4079184-1 gnd Ionenstrahlanalyse (DE-588)4569698-6 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd Ionenstrahl (DE-588)4162347-2 gnd Werkstoffprüfung (DE-588)4037934-6 gnd Materialbearbeitung (DE-588)4139082-9 gnd Werkstoff (DE-588)4065579-9 gnd |
subject_GND | (DE-588)4079184-1 (DE-588)4569698-6 (DE-588)4277034-8 (DE-588)4162347-2 (DE-588)4037934-6 (DE-588)4139082-9 (DE-588)4065579-9 |
title | Ion beams in materials processing and analysis |
title_auth | Ion beams in materials processing and analysis |
title_exact_search | Ion beams in materials processing and analysis |
title_full | Ion beams in materials processing and analysis Bernd Schmidt ; Klaus Wetzig |
title_fullStr | Ion beams in materials processing and analysis Bernd Schmidt ; Klaus Wetzig |
title_full_unstemmed | Ion beams in materials processing and analysis Bernd Schmidt ; Klaus Wetzig |
title_short | Ion beams in materials processing and analysis |
title_sort | ion beams in materials processing and analysis |
topic | Electronics Optical materials Werkstoffkunde (DE-588)4079184-1 gnd Ionenstrahlanalyse (DE-588)4569698-6 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd Ionenstrahl (DE-588)4162347-2 gnd Werkstoffprüfung (DE-588)4037934-6 gnd Materialbearbeitung (DE-588)4139082-9 gnd Werkstoff (DE-588)4065579-9 gnd |
topic_facet | Electronics Optical materials Werkstoffkunde Ionenstrahlanalyse Ionenstrahlbearbeitung Ionenstrahl Werkstoffprüfung Materialbearbeitung Werkstoff |
url | https://doi.org/10.1007/978-3-211-99356-9 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025705041&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
work_keys_str_mv | AT schmidtbernd ionbeamsinmaterialsprocessingandanalysis AT wetzigklaus ionbeamsinmaterialsprocessingandanalysis |