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These are marked with the "Interlibrary loan" label and can be ordered by clicking on them.
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1
Plasma etching processes for interconnect realization in VLSI
Published 2015Other Authors: “…Posseme, Nicolas…”
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2
Plasma etching processes for CMOS device realization
Published 2017Other Authors: “…Posseme, Nicolas…”
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3
Plasma etching processes for interconnect realization in VLSI
Published 2015Other Authors: “…Posseme, Nicolas…”
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