Control of semiconductor interfaces: proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993
This book focuses exclusively on control of interfacial properties and structures for semiconductor device applications from the point of view of improving and developing novel electrical properties. The following topics are covered: metal-semiconductors, semiconductor hetero-interfaces, characteriz...
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | , , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam New York
Elsevier
©1994
|
| Subjects: | |
| Online Access: | FAW01 Volltext |
| Summary: | This book focuses exclusively on control of interfacial properties and structures for semiconductor device applications from the point of view of improving and developing novel electrical properties. The following topics are covered: metal-semiconductors, semiconductor hetero-interfaces, characterization, semiconducting new materials, insulator-semiconductor, interfaces in device, control of interface formation, control of interface properties, contact metallization. A variety of up-to-date research topics such as atomic layer epitaxy, atomic layer passivation, atomic scale characterization in |
| Item Description: | Includes bibliographical references and indexes |
| Physical Description: | 1 online resource (xv, 583 pages) illustrations |
| ISBN: | 9781483290485 1483290484 0444818898 9780444818898 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV044391480 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 170630s1994 |||| o||u| ||||||eng d | ||
| 020 | |a 9781483290485 |9 978-1-4832-9048-5 | ||
| 020 | |a 1483290484 |9 1-4832-9048-4 | ||
| 020 | |a 0444818898 |9 0-444-81889-8 | ||
| 020 | |a 9780444818898 |9 978-0-444-81889-8 | ||
| 035 | |a (ZDB-33-ESD)ocn894227437 | ||
| 035 | |a (OCoLC)894227437 | ||
| 035 | |a (DE-599)BVBBV044391480 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 | ||
| 082 | 0 | |a 537.6/22 |2 22 | |
| 084 | |a UP 7570 |0 (DE-625)146436: |2 rvk | ||
| 110 | 2 | |a International Symposium on Control of Semiconductor Interfaces < 1993, Karuizawa, Japan> |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Control of semiconductor interfaces |b proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 |c edited by I. Ohdomari, M. Oshima, A. Hiraki |
| 264 | 1 | |a Amsterdam |a New York |b Elsevier |c ©1994 | |
| 300 | |a 1 online resource (xv, 583 pages) |b illustrations | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and indexes | ||
| 520 | |a This book focuses exclusively on control of interfacial properties and structures for semiconductor device applications from the point of view of improving and developing novel electrical properties. The following topics are covered: metal-semiconductors, semiconductor hetero-interfaces, characterization, semiconducting new materials, insulator-semiconductor, interfaces in device, control of interface formation, control of interface properties, contact metallization. A variety of up-to-date research topics such as atomic layer epitaxy, atomic layer passivation, atomic scale characterization in | ||
| 650 | 7 | |a Semiconductors / Junctions |2 fast | |
| 650 | 7 | |a Halbleitergrenzfläche |2 swd | |
| 650 | 7 | |a Kongreß |2 swd | |
| 650 | 7 | |a SCIENCE / Physics / Electricity |2 bisacsh | |
| 650 | 7 | |a SCIENCE / Physics / Electromagnetism |2 bisacsh | |
| 650 | 4 | |a Semiconductors / Junctions / Congresses | |
| 650 | 4 | |a Semiconductors / Junctions | |
| 650 | 4 | |a Semiconductors |x Junctions |v Congresses | |
| 650 | 0 | 7 | |a Halbleitergrenzfläche |0 (DE-588)4158802-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleitergrenzfläche |0 (DE-588)4158802-2 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Ohdomari, I. |4 edt | |
| 700 | 1 | |a Oshima, M. |4 edt | |
| 700 | 1 | |a Hiraki, A. |4 edt | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |a International Symposium on Control of Semiconductor Interfaces (1st : 1993 : Karuizawa, Japan) |t Control of semiconductor interfaces |z 0444818898 |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780444818898 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029793702 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u http://www.sciencedirect.com/science/book/9780444818898 |l FAW01 |p ZDB-33-ESD |q FAW_PDA_ESD |x Verlag |3 Volltext | |
Record in the Search Index
| _version_ | 1804177664738590720 |
|---|---|
| any_adam_object | |
| author2 | Ohdomari, I. Oshima, M. Hiraki, A. |
| author2_role | edt edt edt |
| author2_variant | i o io m o mo a h ah |
| author_corporate | International Symposium on Control of Semiconductor Interfaces < 1993, Karuizawa, Japan> |
| author_corporate_role | aut |
| author_facet | Ohdomari, I. Oshima, M. Hiraki, A. International Symposium on Control of Semiconductor Interfaces < 1993, Karuizawa, Japan> |
| author_sort | International Symposium on Control of Semiconductor Interfaces < 1993, Karuizawa, Japan> |
| building | Verbundindex |
| bvnumber | BV044391480 |
| classification_rvk | UP 7570 |
| collection | ZDB-33-ESD |
| ctrlnum | (ZDB-33-ESD)ocn894227437 (OCoLC)894227437 (DE-599)BVBBV044391480 |
| dewey-full | 537.6/22 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 537 - Electricity and electronics |
| dewey-raw | 537.6/22 |
| dewey-search | 537.6/22 |
| dewey-sort | 3537.6 222 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03186nmm a2200589zc 4500</leader><controlfield tag="001">BV044391480</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170630s1994 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781483290485</subfield><subfield code="9">978-1-4832-9048-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1483290484</subfield><subfield code="9">1-4832-9048-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0444818898</subfield><subfield code="9">0-444-81889-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780444818898</subfield><subfield code="9">978-0-444-81889-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn894227437</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)894227437</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044391480</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">537.6/22</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7570</subfield><subfield code="0">(DE-625)146436:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="110" ind1="2" ind2=" "><subfield code="a">International Symposium on Control of Semiconductor Interfaces < 1993, Karuizawa, Japan></subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Control of semiconductor interfaces</subfield><subfield code="b">proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993</subfield><subfield code="c">edited by I. Ohdomari, M. Oshima, A. Hiraki</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam</subfield><subfield code="a">New York</subfield><subfield code="b">Elsevier</subfield><subfield code="c">©1994</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xv, 583 pages)</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and indexes</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This book focuses exclusively on control of interfacial properties and structures for semiconductor device applications from the point of view of improving and developing novel electrical properties. The following topics are covered: metal-semiconductors, semiconductor hetero-interfaces, characterization, semiconducting new materials, insulator-semiconductor, interfaces in device, control of interface formation, control of interface properties, contact metallization. A variety of up-to-date research topics such as atomic layer epitaxy, atomic layer passivation, atomic scale characterization in</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconductors / Junctions</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Halbleitergrenzfläche</subfield><subfield code="2">swd</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Kongreß</subfield><subfield code="2">swd</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Physics / Electricity</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Physics / Electromagnetism</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors / Junctions / Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors / Junctions</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Junctions</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitergrenzfläche</subfield><subfield code="0">(DE-588)4158802-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitergrenzfläche</subfield><subfield code="0">(DE-588)4158802-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ohdomari, I.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Oshima, M.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hiraki, A.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="a">International Symposium on Control of Semiconductor Interfaces (1st : 1993 : Karuizawa, Japan)</subfield><subfield code="t">Control of semiconductor interfaces</subfield><subfield code="z">0444818898</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780444818898</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029793702</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780444818898</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FAW_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV044391480 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:51:41Z |
| institution | BVB |
| isbn | 9781483290485 1483290484 0444818898 9780444818898 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029793702 |
| oclc_num | 894227437 |
| open_access_boolean | |
| owner | DE-1046 |
| owner_facet | DE-1046 |
| physical | 1 online resource (xv, 583 pages) illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FAW_PDA_ESD |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Elsevier |
| record_format | marc |
| spelling | International Symposium on Control of Semiconductor Interfaces < 1993, Karuizawa, Japan> Verfasser aut Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 edited by I. Ohdomari, M. Oshima, A. Hiraki Amsterdam New York Elsevier ©1994 1 online resource (xv, 583 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and indexes This book focuses exclusively on control of interfacial properties and structures for semiconductor device applications from the point of view of improving and developing novel electrical properties. The following topics are covered: metal-semiconductors, semiconductor hetero-interfaces, characterization, semiconducting new materials, insulator-semiconductor, interfaces in device, control of interface formation, control of interface properties, contact metallization. A variety of up-to-date research topics such as atomic layer epitaxy, atomic layer passivation, atomic scale characterization in Semiconductors / Junctions fast Halbleitergrenzfläche swd Kongreß swd SCIENCE / Physics / Electricity bisacsh SCIENCE / Physics / Electromagnetism bisacsh Semiconductors / Junctions / Congresses Semiconductors / Junctions Semiconductors Junctions Congresses Halbleitergrenzfläche (DE-588)4158802-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleitergrenzfläche (DE-588)4158802-2 s 1\p DE-604 Ohdomari, I. edt Oshima, M. edt Hiraki, A. edt Erscheint auch als Druck-Ausgabe International Symposium on Control of Semiconductor Interfaces (1st : 1993 : Karuizawa, Japan) Control of semiconductor interfaces 0444818898 http://www.sciencedirect.com/science/book/9780444818898 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 Semiconductors / Junctions fast Halbleitergrenzfläche swd Kongreß swd SCIENCE / Physics / Electricity bisacsh SCIENCE / Physics / Electromagnetism bisacsh Semiconductors / Junctions / Congresses Semiconductors / Junctions Semiconductors Junctions Congresses Halbleitergrenzfläche (DE-588)4158802-2 gnd |
| subject_GND | (DE-588)4158802-2 (DE-588)1071861417 |
| title | Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 |
| title_auth | Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 |
| title_exact_search | Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 |
| title_full | Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 edited by I. Ohdomari, M. Oshima, A. Hiraki |
| title_fullStr | Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 edited by I. Ohdomari, M. Oshima, A. Hiraki |
| title_full_unstemmed | Control of semiconductor interfaces proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 edited by I. Ohdomari, M. Oshima, A. Hiraki |
| title_short | Control of semiconductor interfaces |
| title_sort | control of semiconductor interfaces proceedings of the first international symposium on control of semiconductor interfaces karuizawa japan 8 12 november 1993 |
| title_sub | proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 November 1993 |
| topic | Semiconductors / Junctions fast Halbleitergrenzfläche swd Kongreß swd SCIENCE / Physics / Electricity bisacsh SCIENCE / Physics / Electromagnetism bisacsh Semiconductors / Junctions / Congresses Semiconductors / Junctions Semiconductors Junctions Congresses Halbleitergrenzfläche (DE-588)4158802-2 gnd |
| topic_facet | Semiconductors / Junctions Halbleitergrenzfläche Kongreß SCIENCE / Physics / Electricity SCIENCE / Physics / Electromagnetism Semiconductors / Junctions / Congresses Semiconductors Junctions Congresses Konferenzschrift |
| url | http://www.sciencedirect.com/science/book/9780444818898 |
| work_keys_str_mv | AT internationalsymposiumoncontrolofsemiconductorinterfaces1993karuizawajapan controlofsemiconductorinterfacesproceedingsofthefirstinternationalsymposiumoncontrolofsemiconductorinterfaceskaruizawajapan812november1993 AT ohdomarii controlofsemiconductorinterfacesproceedingsofthefirstinternationalsymposiumoncontrolofsemiconductorinterfaceskaruizawajapan812november1993 AT oshimam controlofsemiconductorinterfacesproceedingsofthefirstinternationalsymposiumoncontrolofsemiconductorinterfaceskaruizawajapan812november1993 AT hirakia controlofsemiconductorinterfacesproceedingsofthefirstinternationalsymposiumoncontrolofsemiconductorinterfaceskaruizawajapan812november1993 |