Bringing scanning probe microscopy up to speed:
"Bringing Scanning Probe Microscopy up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the prop...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boston [u.a.]
Kluwer Acad. Publ.
1999
|
| Schriftenreihe: | Microsystems
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Zusammenfassung: | "Bringing Scanning Probe Microscopy up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold First, last scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented."--BOOK JACKET |
| Beschreibung: | 173 S. Ill. |
| ISBN: | 0792384660 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804127468996526080 |
|---|---|
| adam_text | BRINGING SCANNING PROBE MICROSCOPY UP TO SPEED BY S. C. MINNE
NANODEVICES, INC. S. R. MANALIS MASSACHUSETTS INSTITUTE OF TECHNOLOGY C.
F. QUATE STANFORD UNIVERSITY W KLUWER ACADEMIC PUBLISHERS BOSTON /
DORDRECHT / LONDON TABLE OF CONTENTS CHAPTER 1 CHAPTER 2 IMPROVING
CONVENTIONAL SCANNING PROBE MICROSCOPES 15 INTRODUCTION 15 THE
PIEZORESISTIVE CANTILEVER 17 IMAGING WITH PARALLEL CANTILEVERS 20 DESIGN
OF PIEZORESISTIVE CANTILEVERS WITH INTEGRATED ACTUATORS 23 INTRODUCTION
23 THE ZNO / PIEZORESISTIVE CANTILEVER 25 THEORY OF OPERATION 28
CENTROID AND MOMENT OF INERTIA 30 SPRING CONSTANT 34 MAXIMUM INDUCED
DEFLECTION 39 MINIMUM DETECTABLE DEFLECTION 42 ACTUATOR-SENSOR COUPLING
45 COMPARISON TO OTHER ANALYSES 46 SUMMARY 47 CHAPTER 3 INCREASING THE
SPEED OF IMAGING 49 INTRODUCTION 49 PARALLEL CANTILEVERS OPERATING UNDER
INDIVIDUAL FEEDBACK CONTROL 51 HIGH SPEED IMAGING USING THE
PIEZORESISTIVE SENSOR 57 IMAGING USING THE ZNO AS THE SENSOR 63 HIGH
SPEED IMAGING WITH THE OPTICAL LEVER SENSOR 68 DYNAMIC IMAGING MODES 76
BRINGING SCANNING PROBE MICROSCOPY UP TO SPEED CHAPTER 4 CANTILEVERS
WITH INTERDIGITAL DEFLECTION SENSORS 81 INTRODUCTION 81 THEORY OF
OPERATION 82 OPTICAL SIMULATIONS 88 MINIMUM DETECTABLE DEFLECTION 94
CHAPTER 5 CHAPTER 6 OPERATION OF THE INTERDIGITAL CANTILEVER 99
MICROSCOPE DESCRIPTION 99 IMAGING 102 BIASING 104 RESOLUTION AND
FREQUENCY RESPONSE 107 INTERDIGITAL CANTILEVER ARRAYS 110 SUMMARY 117
CANTILEVER ARRAYS 119 AUTOMATED, PARALLEL, HIGH-SPEED AFM 119 CENTIMETER
SCALE AFM 127 CHAPTER 7 SCANNING PROBES FOR INFORMATION STORAGE AND
RETRIEVAL 131 INTRODUCTION 131 SUBMICRON RECORDING WITH THIN-FILM
MAGNETIC SCANNING PROBES 133 CHAPTER 8 SILICON PROCESS FLOW: ZNO
ACTUATOR AND PIEZORESISTIVE SENSOR 141 INTRODUCTION 141 PROCESS FLOW 141
VLLL TABLE OF CONTENTS CHAPTER 9 SILICON PROCESS FLOW: INTERDIGITAL
CANTILEVER 159 FABRICATION PROCESS 159 IX
|
| any_adam_object | 1 |
| author | Minne, Stephen C. Manalis, Scott R. Quate, Calvin F. |
| author_facet | Minne, Stephen C. Manalis, Scott R. Quate, Calvin F. |
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| author_sort | Minne, Stephen C. |
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| building | Verbundindex |
| bvnumber | BV012798575 |
| callnumber-first | Q - Science |
| callnumber-label | QH212 |
| callnumber-raw | QH212.S33 |
| callnumber-search | QH212.S33 |
| callnumber-sort | QH 3212 S33 |
| callnumber-subject | QH - Natural History and Biology |
| classification_rvk | UH 6310 |
| ctrlnum | (OCoLC)40644852 (DE-599)BVBBV012798575 |
| dewey-full | 502/.8/2 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 502 - Miscellany |
| dewey-raw | 502/.8/2 |
| dewey-search | 502/.8/2 |
| dewey-sort | 3502 18 12 |
| dewey-tens | 500 - Natural sciences and mathematics |
| discipline | Allgemeine Naturwissenschaft Physik |
| format | Book |
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| id | DE-604.BV012798575 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:33:50Z |
| institution | BVB |
| isbn | 0792384660 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008703700 |
| oclc_num | 40644852 |
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| owner_facet | DE-703 DE-1050 |
| physical | 173 S. Ill. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Kluwer Acad. Publ. |
| record_format | marc |
| series2 | Microsystems |
| spelling | Minne, Stephen C. Verfasser aut Bringing scanning probe microscopy up to speed by S. C. Minne ; S. R. Manalis ; C. F. Quate Boston [u.a.] Kluwer Acad. Publ. 1999 173 S. Ill. txt rdacontent n rdamedia nc rdacarrier Microsystems "Bringing Scanning Probe Microscopy up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold First, last scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented."--BOOK JACKET Scanning probe microscopy Elektronenmikroskopie (DE-588)4014327-2 gnd rswk-swf Rasterelektronenmikroskopie (DE-588)4048455-5 gnd rswk-swf Elektronenmikroskopie (DE-588)4014327-2 s DE-604 Rasterelektronenmikroskopie (DE-588)4048455-5 s Manalis, Scott R. Verfasser aut Quate, Calvin F. Verfasser aut GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008703700&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Minne, Stephen C. Manalis, Scott R. Quate, Calvin F. Bringing scanning probe microscopy up to speed Scanning probe microscopy Elektronenmikroskopie (DE-588)4014327-2 gnd Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| subject_GND | (DE-588)4014327-2 (DE-588)4048455-5 |
| title | Bringing scanning probe microscopy up to speed |
| title_auth | Bringing scanning probe microscopy up to speed |
| title_exact_search | Bringing scanning probe microscopy up to speed |
| title_full | Bringing scanning probe microscopy up to speed by S. C. Minne ; S. R. Manalis ; C. F. Quate |
| title_fullStr | Bringing scanning probe microscopy up to speed by S. C. Minne ; S. R. Manalis ; C. F. Quate |
| title_full_unstemmed | Bringing scanning probe microscopy up to speed by S. C. Minne ; S. R. Manalis ; C. F. Quate |
| title_short | Bringing scanning probe microscopy up to speed |
| title_sort | bringing scanning probe microscopy up to speed |
| topic | Scanning probe microscopy Elektronenmikroskopie (DE-588)4014327-2 gnd Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| topic_facet | Scanning probe microscopy Elektronenmikroskopie Rasterelektronenmikroskopie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008703700&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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