Microsystem technology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
©2001
|
| Schlagworte: | |
| Online-Zugang: | FRO01 UBG01 Volltext |
| Beschreibung: | Includes bibliographical references (pages 465-483) and index This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating |
| Beschreibung: | 1 Online-Ressource (xii, 500 pages) |
| ISBN: | 9783527613007 3527613005 9783527613014 3527613013 9783527296347 9780470035221 3527296344 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV043387108 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 160222s2001 |||| o||u| ||||||eng d | ||
| 020 | |a 9783527613007 |9 978-3-527-61300-7 | ||
| 020 | |a 3527613005 |9 3-527-61300-5 | ||
| 020 | |a 9783527613014 |c electronic bk. |9 978-3-527-61301-4 | ||
| 020 | |a 3527613013 |c electronic bk. |9 3-527-61301-3 | ||
| 020 | |a 9783527296347 |9 978-3-527-29634-7 | ||
| 020 | |a 9780470035221 |9 978-0-470-03522-1 | ||
| 020 | |a 3527296344 |9 3-527-29634-4 | ||
| 024 | 7 | |a 10.1002/9783527613007 |2 doi | |
| 035 | |a (ZDB-35-WIC)ocn184983844 | ||
| 035 | |a (OCoLC)184983844 | ||
| 035 | |a (DE-599)BVBBV043387108 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-861 | ||
| 082 | 0 | |a 621.381 |2 22 | |
| 100 | 1 | |a Menz, W. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Microsystem technology |c W. Menz, J. Mohr, O. Paul |
| 264 | 1 | |a Weinheim |b Wiley-VCH |c ©2001 | |
| 300 | |a 1 Online-Ressource (xii, 500 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references (pages 465-483) and index | ||
| 500 | |a This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Digital |2 bisacsh | |
| 650 | 7 | |a Microelectronics |2 fast | |
| 650 | 4 | |a Microelectronics | |
| 650 | 0 | 7 | |a Systemtechnik |0 (DE-588)4140901-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4522595-3 |a Fallstudiensammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 1 | |a Systemtechnik |0 (DE-588)4140901-2 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Mohr, J. |e Sonstige |4 oth | |
| 700 | 1 | |a Paul, Oliver |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-35-WIC | ||
| 940 | 1 | |q UBG_PDA_WIC | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028805692 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007 |l FRO01 |p ZDB-35-WIC |q FRO_PDA_WIC |x Verlag |3 Volltext | |
| 966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007 |l UBG01 |p ZDB-35-WIC |q UBG_PDA_WIC |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804175957214363648 |
|---|---|
| any_adam_object | |
| author | Menz, W. |
| author_facet | Menz, W. |
| author_role | aut |
| author_sort | Menz, W. |
| author_variant | w m wm |
| building | Verbundindex |
| bvnumber | BV043387108 |
| collection | ZDB-35-WIC |
| ctrlnum | (ZDB-35-WIC)ocn184983844 (OCoLC)184983844 (DE-599)BVBBV043387108 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02755nmm a2200601zc 4500</leader><controlfield tag="001">BV043387108</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">160222s2001 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783527613007</subfield><subfield code="9">978-3-527-61300-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3527613005</subfield><subfield code="9">3-527-61300-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783527613014</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-3-527-61301-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3527613013</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">3-527-61301-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783527296347</subfield><subfield code="9">978-3-527-29634-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780470035221</subfield><subfield code="9">978-0-470-03522-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3527296344</subfield><subfield code="9">3-527-29634-4</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1002/9783527613007</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-35-WIC)ocn184983844</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)184983844</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043387108</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-861</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Menz, W.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microsystem technology</subfield><subfield code="c">W. Menz, J. Mohr, O. Paul</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Weinheim</subfield><subfield code="b">Wiley-VCH</subfield><subfield code="c">©2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xii, 500 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references (pages 465-483) and index</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Microelectronics</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Digital</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectronics</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Systemtechnik</subfield><subfield code="0">(DE-588)4140901-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4522595-3</subfield><subfield code="a">Fallstudiensammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Systemtechnik</subfield><subfield code="0">(DE-588)4140901-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mohr, J.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Paul, Oliver</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-35-WIC</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">UBG_PDA_WIC</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028805692</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007</subfield><subfield code="l">FRO01</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">FRO_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007</subfield><subfield code="l">UBG01</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">UBG_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | (DE-588)4522595-3 Fallstudiensammlung gnd-content |
| genre_facet | Fallstudiensammlung |
| id | DE-604.BV043387108 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:32Z |
| institution | BVB |
| isbn | 9783527613007 3527613005 9783527613014 3527613013 9783527296347 9780470035221 3527296344 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028805692 |
| oclc_num | 184983844 |
| open_access_boolean | |
| owner | DE-861 |
| owner_facet | DE-861 |
| physical | 1 Online-Ressource (xii, 500 pages) |
| psigel | ZDB-35-WIC UBG_PDA_WIC ZDB-35-WIC FRO_PDA_WIC ZDB-35-WIC UBG_PDA_WIC |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Menz, W. Verfasser aut Microsystem technology W. Menz, J. Mohr, O. Paul Weinheim Wiley-VCH ©2001 1 Online-Ressource (xii, 500 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (pages 465-483) and index This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics fast Microelectronics Systemtechnik (DE-588)4140901-2 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)4522595-3 Fallstudiensammlung gnd-content Mikrosystemtechnik (DE-588)4221617-5 s Systemtechnik (DE-588)4140901-2 s 1\p DE-604 Mohr, J. Sonstige oth Paul, Oliver Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Menz, W. Microsystem technology TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics fast Microelectronics Systemtechnik (DE-588)4140901-2 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4140901-2 (DE-588)4221617-5 (DE-588)4522595-3 |
| title | Microsystem technology |
| title_auth | Microsystem technology |
| title_exact_search | Microsystem technology |
| title_full | Microsystem technology W. Menz, J. Mohr, O. Paul |
| title_fullStr | Microsystem technology W. Menz, J. Mohr, O. Paul |
| title_full_unstemmed | Microsystem technology W. Menz, J. Mohr, O. Paul |
| title_short | Microsystem technology |
| title_sort | microsystem technology |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics fast Microelectronics Systemtechnik (DE-588)4140901-2 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Microelectronics Systemtechnik Mikrosystemtechnik Fallstudiensammlung |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007 |
| work_keys_str_mv | AT menzw microsystemtechnology AT mohrj microsystemtechnology AT pauloliver microsystemtechnology |