Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor:
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| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Erlangen ; Nürnberg
Friedrich-Alexander-Universität Erlangen-Nürnberg
2022
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| Ausgabe: | Postprint |
| Online-Zugang: | Volltext Volltext Volltext |
| Beschreibung: | Aus: ACS Applied Nano Materials 5.3 (2022): 3855–3865. <https://pubs.acs.org/doi/10.1021/acsanm.1c04481> |
| Beschreibung: | 1 Online-Ressource PDF |
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Datensatz im Suchindex
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| author | Bilgilisoy, Elif Yu, Jo-Chi Preischl, Christian McElwee-White, Lisa Steinrück, Hans-Peter Marbach, Hubertus |
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| language | English |
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| spelling | Bilgilisoy, Elif Verfasser aut Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor Elif Bilgilisoy, Jo-Chi Yu, Christian Preischl, Lisa McElwee-White, Hans-Peter Steinrück, Hubertus Marbach Postprint Erlangen ; Nürnberg Friedrich-Alexander-Universität Erlangen-Nürnberg 2022 1 Online-Ressource PDF txt rdacontent c rdamedia cr rdacarrier Aus: ACS Applied Nano Materials 5.3 (2022): 3855–3865. <https://pubs.acs.org/doi/10.1021/acsanm.1c04481> Archivierung/Langzeitarchivierung gewährleistet DE-101 pdager Yu, Jo-Chi Verfasser aut Preischl, Christian Verfasser aut McElwee-White, Lisa Verfasser aut Steinrück, Hans-Peter Verfasser aut Marbach, Hubertus Verfasser aut Sonderdruck aus ACS Applied Nano Materials Vol. 5 (2022), Seite 3855 - 3865 10.1021/acsanm.1c04481 https://nbn-resolving.org/urn:nbn:de:bvb:29-opus4-197739 Resolving-System kostenfrei Volltext https://d-nb.info/1262567947/34 Langzeitarchivierung Nationalbibliothek kostenfrei Volltext application/pdf https://open.fau.de/handle/openfau/19773 Verlag kostenfrei Volltext 1\p aepkn 0,98409 20220716 DE-101 https://d-nb.info/provenance/plan#aepkn 2\p emasg 0,07910 20220716 DE-101 https://d-nb.info/provenance/plan#emasg 3\p npi 20220715 DE-101 https://d-nb.info/provenance/plan#npi |
| spellingShingle | Bilgilisoy, Elif Yu, Jo-Chi Preischl, Christian McElwee-White, Lisa Steinrück, Hans-Peter Marbach, Hubertus Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor |
| title | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor |
| title_auth | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor |
| title_exact_search | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor |
| title_exact_search_txtP | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor |
| title_full | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor Elif Bilgilisoy, Jo-Chi Yu, Christian Preischl, Lisa McElwee-White, Hans-Peter Steinrück, Hubertus Marbach |
| title_fullStr | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor Elif Bilgilisoy, Jo-Chi Yu, Christian Preischl, Lisa McElwee-White, Hans-Peter Steinrück, Hubertus Marbach |
| title_full_unstemmed | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor Elif Bilgilisoy, Jo-Chi Yu, Christian Preischl, Lisa McElwee-White, Hans-Peter Steinrück, Hubertus Marbach |
| title_short | Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor |
| title_sort | simultaneous focused electron beam induced deposition and etching in uhv with ru co 4i2 as precursor |
| url | https://nbn-resolving.org/urn:nbn:de:bvb:29-opus4-197739 https://d-nb.info/1262567947/34 https://open.fau.de/handle/openfau/19773 |
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