Spectroscopic ellipsometry and reflectometry: a user's guide
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York [u.a.]
Wiley
1999
|
| Series: | A Wiley-Interscience publication
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XIV, 228 S. graph. Darst. |
| ISBN: | 0471181722 |
Staff View
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| 245 | 1 | 0 | |a Spectroscopic ellipsometry and reflectometry |b a user's guide |c Harland G. Tompkins ; William A. McGahan |
| 264 | 1 | |a New York [u.a.] |b Wiley |c 1999 | |
| 300 | |a XIV, 228 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 650 | 4 | |a Réflectomètres | |
| 650 | 4 | |a Surfaces (Technologie) | |
| 650 | 4 | |a Ellipsometry | |
| 650 | 4 | |a Materials |x Optical properties | |
| 650 | 4 | |a Reflectometer | |
| 650 | 4 | |a Surfaces (Technology) | |
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Record in the Search Index
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| adam_text | MBHi CONTENTS
PREFACE xiii
1 Perspective and History 1
1.1 Historical Aspects 1
1.2 Complementary Nature of the Techniques 2
1.3 Format and Purpose of the Book 3
1.4 References 4
2 Fundamentals 6
2.1 Description of an Electromagnetic Wave 6
2.2 The Effect of Matter on Electromagnetic Waves 8
2.2.1 The Complex Index of Refraction 8
2.2.2 Laws of Reflection and Refraction 10
2.3 Polarized Light 11
2.3.1 Sources 11
2.3.2 Linearly Polarized Light 11
2.3.3 Elliptically Polarized Light 12
2.3.4 Application of Elliptically Polarized Light 14
2.4 The Reflection of Light 14
2.4.1 Orientation 14
2.4.2 The Reflection Equations of Fresnel 15
2.4.3 The Brewster Angle 15
2.4.4 Reflections with Films 18
2.5 Ellipsometry and Reflectometry Definitions 19
2.5.1 Reflectance 19
2.5.2 Delta and Psi 20
2.5.3 The Fundamental Equation of Ellipsometry 20
2.6 References 21
3 Optical Properties of Materials and Layered Structures 23
3.1 The Physical Meaning of the Optical Constants 23
3.2 Conventions and More Basics 24
v
Vi CONTENTS
3.3 The Lorentz Oscillator 26
3.4 Insulators 28
3.5 Semiconductors 29
3.6 Metals 31
3.7 Kramers Kronig Relations 33
3.8 Miscellaneous 33
3.9 References 34
4 Instrumentation 35
4.1 Introduction 35
4.2 Reflectometry in General 35
4.3 Reflectometer Hardware Configurations 36
4.4 Reflectometer Components 39
4.4.1 Sources 39
4.4.2 Beamsplitter 39
4.4.3 Lenses 39
4.4.4 Monochromators and Detectors 39
4.5 Ellipsometry in General 40
4.6 Optical Components Used in Ellipsometers 40
4.6.1 Sources 40
4.6.2 Polarizers 41
4.6.3 Compensators 42
4.6.4 Monochromators 42
4.6.5 Detectors 44
4.7 Ellipsometer Hardware Configurations 44
4.7.1 Null Ellipsometry 44
4.7.2 Rotating Element Photometric Ellipsometry 45
4.7.3 Modulation Ellipsometry 48
4.8 Single Wavelength Ellipsometers 49
4.9 Spectroscopic Ellipsometers 49
4.10 Instrument Parameter Characterization 50
4.11 Research vs. Production Ellipsometry 50
4.12 Errors in Reflectance and Ellipsometric Measurements 52
4.13 References 53
5 The Anatomy of a Reflectance Spectrum 54
5.1 General 54
5.2 Spectra for Substrates Only 54
5.3 With a Film: The Effect of Wavelength 55
5.4 Contribution of Film Thickness 57
CONTENTS vti
5.5 Contribution of the Optical Constant Spectra of Film and
Substrate 59
5.6 Summary 61
6 Aspects of Single Wavelength Ellipsometry 62
6.1 General 62
6.2 Substrates: Delta and Psi and the Optical Constants 62
6.3 Calculating Delta/Psi Trajectories 66
6.4 Delta/Psi Trajectories for Transparent Films 67
6.5 Delta/Psi Trajectories for Absorbing Films 71
6.6 Trajectories for Two Film Structures 72
6.7 Key Issues 73
6.8 References 74
7 The Anatomy of an EUipsometric Spectrum 75
7.1 General 75
7.2 Typical Spectra 75
7.3 Spectra for Substrates Only 77
7.4 With a Film: Single Wavelength Considerations 77
7.5 Effect of Wavelength 79
7.6 Contribution of the Optical Constant Spectra of Film and
Substrate 81
7.7 Contribution of Film Thickness 82
7.8 Summary 83
7.9 References 84
8 Analytical Methods and Approach 85
8.1 General Approach 85
8.2 Sample Positioning 85
8.3 How Much Data? 86
8.3.1 Wavelength 86
8.3.2 Angle of Incidence 87
8.4 Analytical Methods 88
8.4.1 General 88
8.4.2 Tabulated Optical Constants 89
8.4.3 Simple Mixtures of Tabulated Optical Constants 90
8.4.4 Dispersion Relationships 93
8.4.5 Point by Point Optical Constants 95
8.4.6 Regression Process 96
8.5 Summary 97
8.6 References 97
VIH CONTENTS
9 Optical Data Analysis 98
9.1 introduction 98
9.2 Direct Calculation 99
9.3 Regression Analysis Methods 101
9.3.1 The Problem 101
9.3.2 The Merit Function 101
9.3.3 The Regression Algorithm 102
9.4 Hybrid Methods 103
9.5 Goodness of Fit 103
9.6 Uniqueness 104
9.7 Combined Analysis of Multiple Data Types 105
9.8 Multiple Sample Analysis 106
9.9 Errors—Systematic and Random 106
9.10 References 107
10 Quality Assurance 108
10.1 General 108
10.2 Precision vs. Accuracy 108
10.3 Standards 109
10.4 Quality Assurance Measurements 110
10.5 References 112
11 Very Thin Films 113
11.1 Introduction 113
11.2 Determining Thickness 113
11.2.1 For Reflectance 113
11.2.2 For Ellipsometry 115
11.3 Determining Optical Constants 117
11.4 Distinguishing Between Materials 118
11.5 References 122
12 Roughness 123
12.1 Introduction 123
12.2 Roughness in General 123
12.3 Approximation of Surface Roughness as an Oxide Layer 124
12.4 Effective Medium Approximations (EMAs) 125
12.5 Examples 126
12.5.1 Polysilicon 126
12.5.2 Sensitivity in the Visible 127
12.5.3 Roughness Effects when Determining Optical
Constants 128
12.5.4 SOI Interface Roughness 128
12.6 References 130
CONTENTS ix
PROTOTYPICAL ANALYSES
No. 1 Thermal Oxide, LPCVD Nitride, or Photoresist on Silicon 133
PA1.1 Salient Feature 133
PA1.2 Thinner Films 133
PA 1.3 Intermediate Films 135
PA 1.4 Thicker Films 136
No. 2 Silicon Oxynitrides, PECVD Silicon Oxides, and Polysilicon 138
PA2.1 Salient Feature 138
PA2.2 Polysilicon 138
PA2.3 PECVD Silicon Oxides 141
PA2.4 Silicon Oxynitrides 142
PA2.5 References 146
No. 3 PECVD Silicon Nitride, Silicon Dioxide, and Photoresist on
Silicon 147
PA3.1 Salient Feature 147
PA3.2 Cauchy Modeling 147
No. 4 LPCVD Polysilicon and Amorphous Silicon 155
PA4.1 Salient Feature 155
PA4.2 The Problem 155
PA4.3 The Optical Constants 155
PA4.4 Using the EM A Model 156
PA4.5 Using the Lorentz Oscillator Dispersion Model 156
PA4.6 References 160
No. 5 Substrate Optical Constant Determination 161
PA5.1 Salient Feature 161
PA5.2 Aluminum 161
PA5.3 Glass 163
No. 6 Analysis of Films on Transparent Substrates 166
PA6.1 Salient Feature 166
PA6.2 The Structure of the Example 166
PA6.3 Transmission 166
PA6.4 Reflection 167
PA6.5 Ellipsometry 169
PA6.6 Reverse Ellipsometry 170
PA6.7 Summary 171
PA6.8 References 172
X CONTENTS
No. 7 Very Thick Films 173
PA7.1 Salient Feature 173
PA7.2 Thick Photoresist on Silicon—Reflectometry 173
PA7.3 Thick Photoresist on Glass—Ellipsometry 175
PA7.4 Conclusion 176
No. 8 Compositional Analysis of Materials 178
PA8.1 Salient Feature 178
PA8.2 Background 178
PA8.3 GaAs/AlGaAs/GaAs 179
PA8.4 References 180
No. 9 Thin Metal Films 181
PA9.1 Salient Feature 181
PA9.2 Background 181
PA9.3 Thin Titanium on Silicon 182
PA9.4 Thin Titanium Nitride on Oxide on Silicon 182
PA9.5 Using Multiple Films of Thin Metal 184
PA9.6 Comments and Summary 187
PA9.7 References 187
No. 10 Photoresist Optical Constants 188
PA10.1 Salient Feature 188
PA10.2 Background 188
PA10.3 Photoresist on Silicon 189
PA10.4 Summary 190
APPENDICES
A Regression Algorithms 195
A.I The Merit Function 195
A.2 The Analysis Procedure 195
A.3 The Algorithms 196
A.4 The Combination 197
A.5 References 198
B Maxwell s Equations and the Wave Equation 199
B.I Introduction 199
B.2 Differential Equation Form of Maxwell s Equations 201
B.3 The Wave Equation 201
CONTENTS Xi
B.3.1 Dielectric Media 201
B.3.2 Including Conductors 204
B.3.3 The Magnetic Field Wave 205
B.4 References 207
B.5 Vector Calculus Notation Review 207
B.5.1 Vector Algebra 207
B.5,2 Scalar and Vector Fields 208
B.5.3 Vector Calculus 208
C Snell s Law, Fresnel s Equations, and the Total Reflection
Coefficient Derivations and Historical Perspective 212
C.I Introduction 212
C.2 Reflection and Refraction (Snell s Law) 212
C.3 Fresnel s Reflection and Transmission Coefficients 216
C.4 Using the Complex Index of Refraction 220
C.5 Total Reflection Coefficient for a Film on a Substrate 221
C.6 References 224
INDEX 225
|
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| illustrated | Illustrated |
| indexdate | 2024-07-09T18:28:55Z |
| institution | BVB |
| isbn | 0471181722 |
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| record_format | marc |
| series2 | A Wiley-Interscience publication |
| spelling | Tompkins, Harland G. 1938- Verfasser (DE-588)129994987 aut Spectroscopic ellipsometry and reflectometry a user's guide Harland G. Tompkins ; William A. McGahan New York [u.a.] Wiley 1999 XIV, 228 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier A Wiley-Interscience publication Couches minces - Propriétés optiques Ellipsométrie Espectrometria larpcal Filmes finos larpcal Materiais larpcal Matériaux - Propriétés optiques Propriedades óticas larpcal Réflectomètres Surfaces (Technologie) Ellipsometry Materials Optical properties Reflectometer Surfaces (Technology) Thin films Optical properties Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf Oberflächeneigenschaft (DE-588)4219221-3 gnd rswk-swf Reflektometrie (DE-588)4296759-4 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Werkstoff (DE-588)4065579-9 s Dünne Schicht (DE-588)4136925-7 s Oberflächeneigenschaft (DE-588)4219221-3 s Reflektometrie (DE-588)4296759-4 s DE-604 Ellipsometrie (DE-588)4152025-7 s MacGahan, William A. Verfasser aut HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008495251&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Tompkins, Harland G. 1938- MacGahan, William A. Spectroscopic ellipsometry and reflectometry a user's guide Couches minces - Propriétés optiques Ellipsométrie Espectrometria larpcal Filmes finos larpcal Materiais larpcal Matériaux - Propriétés optiques Propriedades óticas larpcal Réflectomètres Surfaces (Technologie) Ellipsometry Materials Optical properties Reflectometer Surfaces (Technology) Thin films Optical properties Dünne Schicht (DE-588)4136925-7 gnd Werkstoff (DE-588)4065579-9 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Reflektometrie (DE-588)4296759-4 gnd Ellipsometrie (DE-588)4152025-7 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4065579-9 (DE-588)4219221-3 (DE-588)4296759-4 (DE-588)4152025-7 |
| title | Spectroscopic ellipsometry and reflectometry a user's guide |
| title_auth | Spectroscopic ellipsometry and reflectometry a user's guide |
| title_exact_search | Spectroscopic ellipsometry and reflectometry a user's guide |
| title_full | Spectroscopic ellipsometry and reflectometry a user's guide Harland G. Tompkins ; William A. McGahan |
| title_fullStr | Spectroscopic ellipsometry and reflectometry a user's guide Harland G. Tompkins ; William A. McGahan |
| title_full_unstemmed | Spectroscopic ellipsometry and reflectometry a user's guide Harland G. Tompkins ; William A. McGahan |
| title_short | Spectroscopic ellipsometry and reflectometry |
| title_sort | spectroscopic ellipsometry and reflectometry a user s guide |
| title_sub | a user's guide |
| topic | Couches minces - Propriétés optiques Ellipsométrie Espectrometria larpcal Filmes finos larpcal Materiais larpcal Matériaux - Propriétés optiques Propriedades óticas larpcal Réflectomètres Surfaces (Technologie) Ellipsometry Materials Optical properties Reflectometer Surfaces (Technology) Thin films Optical properties Dünne Schicht (DE-588)4136925-7 gnd Werkstoff (DE-588)4065579-9 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Reflektometrie (DE-588)4296759-4 gnd Ellipsometrie (DE-588)4152025-7 gnd |
| topic_facet | Couches minces - Propriétés optiques Ellipsométrie Espectrometria Filmes finos Materiais Matériaux - Propriétés optiques Propriedades óticas Réflectomètres Surfaces (Technologie) Ellipsometry Materials Optical properties Reflectometer Surfaces (Technology) Thin films Optical properties Dünne Schicht Werkstoff Oberflächeneigenschaft Reflektometrie Ellipsometrie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008495251&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT tompkinsharlandg spectroscopicellipsometryandreflectometryausersguide AT macgahanwilliama spectroscopicellipsometryandreflectometryausersguide |