Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers:
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| Hauptverfasser: | , , , , |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Erlangen ; Nürnberg
Friedrich-Alexander-Universität Erlangen-Nürnberg
2023
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| Schlagworte: | |
| Online-Zugang: | Volltext Volltext |
| Beschreibung: | 1 Online-Ressource |
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| spelling | Hochreiter, André Verfasser aut Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers André Hochreiter, Fabian Groß, Morris-Niklas Möller, Michael Krieger, Heiko B. Weber Erlangen ; Nürnberg Friedrich-Alexander-Universität Erlangen-Nürnberg 2023 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Archivierung/Langzeitarchivierung gewährleistet DE-101 pdager Engineering. Science. Life sciences. Psychology. Computer science. Technology and Engineering. Physical Sciences. Life Sciences. Behavioral Sciences and Psychology. Computer Science. Groß, Fabian Verfasser aut Möller, Morris-Niklas Verfasser aut Krieger, Michael Verfasser aut Weber, Heiko B. Verfasser aut Sonderdruck aus Scientific Reports Vol. 13 (2023) 10.1038/s41598-023-46110-2 https://open.fau.de/handle/openfau/31525 Verlag kostenfrei Volltext https://d-nb.info/1316820106/34 Langzeitarchivierung Nationalbibliothek kostenfrei Volltext 1\p emakn 0,35575 20240123 DE-101 https://d-nb.info/provenance/plan#emakn 2\p emasg 0,48533 20240123 DE-101 https://d-nb.info/provenance/plan#emasg 3\p npi 20240122 DE-101 https://d-nb.info/provenance/plan#npi |
| spellingShingle | Hochreiter, André Groß, Fabian Möller, Morris-Niklas Krieger, Michael Weber, Heiko B. Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers Engineering. Science. Life sciences. Psychology. Computer science. |
| title | Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers |
| title_auth | Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers |
| title_exact_search | Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers |
| title_full | Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers André Hochreiter, Fabian Groß, Morris-Niklas Möller, Michael Krieger, Heiko B. Weber |
| title_fullStr | Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers André Hochreiter, Fabian Groß, Morris-Niklas Möller, Michael Krieger, Heiko B. Weber |
| title_full_unstemmed | Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers André Hochreiter, Fabian Groß, Morris-Niklas Möller, Michael Krieger, Heiko B. Weber |
| title_short | Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers |
| title_sort | electrochemical etching strategy for shaping monolithic 3d structures from 4h sic wafers |
| topic | Engineering. Science. Life sciences. Psychology. Computer science. |
| topic_facet | Engineering. Science. Life sciences. Psychology. Computer science. |
| url | https://open.fau.de/handle/openfau/31525 https://d-nb.info/1316820106/34 |
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