Levelling

Levelling or leveling (American English; see spelling differences) is a branch of surveying, the object of which is to establish or verify or measure the height of specified points relative to a datum. It is widely used in geodesy and cartography to measure vertical position with respect to a vertical datum, and in construction to measure height differences of construction artifacts. In photolithography, the same term is used in a lithography machine calibration step measuring or calibrating wafer surface height with respect to a reference. Provided by Wikipedia