Micromachined thin-film sensors for SOI-CMOS co-integration:
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
New York
Springer
2006
|
| Schlagworte: | |
| Online-Zugang: | BTU01 FHR01 Volltext |
| Beschreibung: | 1 Online-Ressource (XIII, 292 S. Ill., graph. Darst.) |
| ISBN: | 9780387288420 9780387288437 |
| DOI: | 10.1007/0-387-28843-0 |
Internformat
MARC
| LEADER | 00000nmm a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV023198226 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 080305s2006 |||| o||u| ||||||eng d | ||
| 016 | 7 | |a 977468410 |2 DE-101 | |
| 020 | |a 9780387288420 |9 978-0-387-28842-0 | ||
| 020 | |a 9780387288437 |c Online |9 978-0-387-28843-7 | ||
| 024 | 7 | |a 10.1007/0-387-28843-0 |2 doi | |
| 035 | |a (OCoLC)315796426 | ||
| 035 | |a (DE-599)DNB977468410 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-898 |a DE-83 |a DE-634 | ||
| 084 | |a ZQ 3120 |0 (DE-625)158040: |2 rvk | ||
| 084 | |a 620 |2 sdnb | ||
| 100 | 1 | |a Laconte, Jean |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Micromachined thin-film sensors for SOI-CMOS co-integration |c by J. Laconte ; D. Flandre ; J.-P. Raskin |
| 264 | 1 | |a New York |b Springer |c 2006 | |
| 300 | |a 1 Online-Ressource (XIII, 292 S. |b Ill., graph. Darst.) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 650 | 0 | 7 | |a Dünnschichtsensor |0 (DE-588)4311478-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a CMOS |0 (DE-588)4010319-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Dünnschichtsensor |0 (DE-588)4311478-7 |D s |
| 689 | 0 | 1 | |a CMOS |0 (DE-588)4010319-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Flandre, Denis |e Verfasser |4 aut | |
| 700 | 1 | |a Raskin, Jean-Pierre |e Verfasser |4 aut | |
| 856 | 4 | 0 | |u https://doi.org/10.1007/0-387-28843-0 |x Verlag |3 Volltext |
| 912 | |a ZDB-2-ENG | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-016384507 | ||
| 966 | e | |u https://doi.org/10.1007/0-387-28843-0 |l BTU01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/0-387-28843-0 |l FHR01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804137473519910912 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author | Laconte, Jean Flandre, Denis Raskin, Jean-Pierre |
| author_facet | Laconte, Jean Flandre, Denis Raskin, Jean-Pierre |
| author_role | aut aut aut |
| author_sort | Laconte, Jean |
| author_variant | j l jl d f df j p r jpr |
| building | Verbundindex |
| bvnumber | BV023198226 |
| classification_rvk | ZQ 3120 |
| collection | ZDB-2-ENG |
| ctrlnum | (OCoLC)315796426 (DE-599)DNB977468410 |
| discipline | Maschinenbau / Maschinenwesen Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| discipline_str_mv | Maschinenbau / Maschinenwesen Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| doi_str_mv | 10.1007/0-387-28843-0 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01634nmm a2200445 c 4500</leader><controlfield tag="001">BV023198226</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">080305s2006 |||| o||u| ||||||eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">977468410</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780387288420</subfield><subfield code="9">978-0-387-28842-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780387288437</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-387-28843-7</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/0-387-28843-0</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)315796426</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB977468410</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-898</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-634</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZQ 3120</subfield><subfield code="0">(DE-625)158040:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">620</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Laconte, Jean</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Micromachined thin-film sensors for SOI-CMOS co-integration</subfield><subfield code="c">by J. Laconte ; D. Flandre ; J.-P. Raskin</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">Springer</subfield><subfield code="c">2006</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XIII, 292 S.</subfield><subfield code="b">Ill., graph. Darst.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichtsensor</subfield><subfield code="0">(DE-588)4311478-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünnschichtsensor</subfield><subfield code="0">(DE-588)4311478-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Flandre, Denis</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Raskin, Jean-Pierre</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/0-387-28843-0</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016384507</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/0-387-28843-0</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/0-387-28843-0</subfield><subfield code="l">FHR01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV023198226 |
| illustrated | Illustrated |
| index_date | 2024-07-02T20:07:13Z |
| indexdate | 2024-07-09T21:12:51Z |
| institution | BVB |
| isbn | 9780387288420 9780387288437 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016384507 |
| oclc_num | 315796426 |
| open_access_boolean | |
| owner | DE-898 DE-BY-UBR DE-83 DE-634 |
| owner_facet | DE-898 DE-BY-UBR DE-83 DE-634 |
| physical | 1 Online-Ressource (XIII, 292 S. Ill., graph. Darst.) |
| psigel | ZDB-2-ENG |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | Springer |
| record_format | marc |
| spelling | Laconte, Jean Verfasser aut Micromachined thin-film sensors for SOI-CMOS co-integration by J. Laconte ; D. Flandre ; J.-P. Raskin New York Springer 2006 1 Online-Ressource (XIII, 292 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Dünnschichtsensor (DE-588)4311478-7 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf Dünnschichtsensor (DE-588)4311478-7 s CMOS (DE-588)4010319-5 s DE-604 Flandre, Denis Verfasser aut Raskin, Jean-Pierre Verfasser aut https://doi.org/10.1007/0-387-28843-0 Verlag Volltext |
| spellingShingle | Laconte, Jean Flandre, Denis Raskin, Jean-Pierre Micromachined thin-film sensors for SOI-CMOS co-integration Dünnschichtsensor (DE-588)4311478-7 gnd CMOS (DE-588)4010319-5 gnd |
| subject_GND | (DE-588)4311478-7 (DE-588)4010319-5 |
| title | Micromachined thin-film sensors for SOI-CMOS co-integration |
| title_auth | Micromachined thin-film sensors for SOI-CMOS co-integration |
| title_exact_search | Micromachined thin-film sensors for SOI-CMOS co-integration |
| title_exact_search_txtP | Micromachined thin-film sensors for SOI-CMOS co-integration |
| title_full | Micromachined thin-film sensors for SOI-CMOS co-integration by J. Laconte ; D. Flandre ; J.-P. Raskin |
| title_fullStr | Micromachined thin-film sensors for SOI-CMOS co-integration by J. Laconte ; D. Flandre ; J.-P. Raskin |
| title_full_unstemmed | Micromachined thin-film sensors for SOI-CMOS co-integration by J. Laconte ; D. Flandre ; J.-P. Raskin |
| title_short | Micromachined thin-film sensors for SOI-CMOS co-integration |
| title_sort | micromachined thin film sensors for soi cmos co integration |
| topic | Dünnschichtsensor (DE-588)4311478-7 gnd CMOS (DE-588)4010319-5 gnd |
| topic_facet | Dünnschichtsensor CMOS |
| url | https://doi.org/10.1007/0-387-28843-0 |
| work_keys_str_mv | AT lacontejean micromachinedthinfilmsensorsforsoicmoscointegration AT flandredenis micromachinedthinfilmsensorsforsoicmoscointegration AT raskinjeanpierre micromachinedthinfilmsensorsforsoicmoscointegration |