Ultrathin calcium titanate capacitors: physics and application
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
Logos-Verl.
2014
|
| Schriftenreihe: | Research at NaMLab
3 |
| Schlagworte: | |
| Online-Zugang: | Inhaltstext Inhaltsverzeichnis Inhaltsverzeichnis |
| Beschreibung: | VIII, 149 S. Ill., graph. Darst. |
| ISBN: | 3832537244 9783832537241 |
Internformat
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Datensatz im Suchindex
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CONTENTS
NOMENCLATURE VII
1 INTRODUCTION 1
1.1 MOTIVATION 1
1.2 STRUCTURE OF THIS WORK 3
2 FUNDAMENTALS OF MATERIALS AND ELECTRICAL PROPERTIES 5
2.1 CALCIUM TITANATE 5
2.1.1 STRUCTURE 6
2.1.2 OPTICAL PROPERTIES AND BAND GAP 6
2.1.3 PERMITTIVITY OF CATI0
3
7
2.1.4 CURRENT APPLICATIONS FOR CATIOS 9
2.2 METALS AND CONDUCTING METAL COMPOSITES FOR APPLICABLE HIGH
TEMPERATURE
PROCESSES 10
2.3 NON-LINEARITY OF DIELECTRIC PERMITTIVITY 13
2.4 LEAKAGE CURRENT MECHANISMS 15
2.4.1 SCHOTTKY EMISSION 15
2.4.2 TUNNELING 17
2.4.3 POOLE-FRENKEL EFFECT 17
2.4.4 TRAP-ASSISTED TUNNELING 18
2.5 DIELECTRIC RELAXATION 19
2.6 AMORPHOUS VERSUS CRYSTALLINE DIELECTRIC LAYERS 19
3 SAMPLE PREPARATION AND METHODS 21
3.1 SAMPLE PREPARATION OF NIETAL-INSULATOR-INETAL CAPACITORS 21
3.1.1 SPUTTERING OF ELECTRODES AND HIGH-A: DIELECTRICS 21
3.1.2 STANDARD PARAMETERS FOR METAL DEPOSITION 21
3.1.3 PARAMETERS FOR DIELECTRIC DEPOSITION 22
3.1.4 STRUCTURING OF TOP ELECTRODES 23
HTTP://D-NB.INFO/1053529325
CONTENTS
3.2 PHYSICAL CHARACTERIZATION 24
3.3 ELECTRICAL CHARACTERIZATION 2G
3.3.1 CURRENT VOLTAGE MEASUREMENTS 2G
3.3.2 LEAKAGE CURRENT MEASUREMENTS AT DIFFERENT TEMPERATURES 28
3.3.3 CAPACITANCE VOLTAGE MEASUREMENTS 28
3.3.4 RELAXATION MEASUREMENTS ' 30
4 TEMPERATURE STABLE HIGH WORK FUNCTION ELECTRODES 33
4.1 SPUTTER DEPOSITION OF ELECTRODES 33
4.1.1 TITANIUM NITRIDE LAYERS 33
4.1.2 RUTHENIUM AND RUTHENIUM DIOXIDE LAYERS 37
4.1.3 PLATINUM ELECTRODES 39
4.1.4 PLATINUM ON TITANIUM NITRIDE 40
4.2 CVD DEPOSITION OF CARBON ELECTRODES 42
4.3 CONCLUSION 43
5 PHYSICAL INVESTIGATION OF CALCIUM TITANATE LAYERS 45
5.1 EXPERIMENTS ON OPTICAL PROPERTIES AND DENSITY OF CATIOJ LAYERS 45
5.1.1 REFRACTIVE INDEX AND EXTINCTION COEFFICIENT OF CATIOS 45
5.1.2 BAND GAP DETERMINATION WITH LOW ENERGY ELECTRON ENERGY LOSS SPEC
TROSCOPY 46
5.1.3 DENSITY APPROXIMATION WITH X-RAY REFLECTANCE 51
5.2 X-RAY PHOTOELCCTRON SPECTROSCOPY OF CATIOA LAYERS 53
5.3 STOICHIOMETRY OF CATI03 LAYERS 57
5.4 ROUGHNESS AND CRYSTALLINITY OF CATIC
3
LAYERS 58
5.4.1 SURFACE ROUGHNESS 58
5.4.2 CRYSTALLIZATION OF CATIC
3
59
5.5 CONCLUSION AND SUMMARY 62
6 TEM CHARACTERIZATION ON CRYSTALLINITY OF CATI0
3
65
6.1 CRYSTALLIZATION BEHAVIOR AT 550C 65
6.2 STRAIN IN DIELECTRIC LAYER INDUCED BY TOP ELECTRODE 67
6.3 COMPARISON OF POST DEPOSITION ANNEALS AND CATIOS CRYSTALLIZATION
DURING
GROWTH 69
6.4 NANOCRYSTALS OF CATI0
3
IN AN AMORPHOUS MATRIX 73
6.5 DISCUSSION OF PREFERENTIAL GROWTH 78
6.6 CONCLUSION 80
CONTENTS
7 ELECTRICAL CHARACTERIZATION OF CATI0
3
IN MIM CAPACITOR STACKS 83
7.1 THE RELATION BETWEEN PHYSICAL AND ELECTRICAL PROPERTIES OF CATIC
3
MIM
CAPACITORS 83
7.2 CAPACITANCE MEASUREMENTS OF CATIC
3
CAPACITORS 84
7.2.1 CAPACITANCE DEPENDENCE ON THICKNESS 85
7.2.2 NON-LINEAR VOLTAGE DEPENDENCE OF CAPACITANCE 86
7.2.3 TEMPERATURE DEPENDENCE OF CAPACITANCE 91
7.2.4 FREQUENCY DEPENDENCE OF CATI0
3
CAPACITANCE 93
7.3 LEAKAGE CURRENTS IN CATI0
3
CAPACITORS 95
7.3.1 THE INFLUENCE OF DIFFERENT ELECTRODES 95
7.3.2 THICKNESS DEPENDENCE OF LEAKAGE CURRENTS 100
7.3.3 TEMPERATURE DEPENDENCE OF LEAKAGE CURRENTS 101
7.4 RELAXATION 108
7.5 OPTIMIZED CAPACITANCE AND LEAKAGE USING SEMICRYSTALLINE SAMPLES .
110
7.6 CONCLUSION ILL
8 SUMMARY AND CONCLUSION 115
A EXTRACTION OF OPTICAL CONSTANTS 121
B INVESTIGATION OF TEMPERATURE LEAKAGE CURRENTS AND EXTRACTION OF
BARRIER
HEIGHTS 123
BIBLIOGRAPHY 127 |
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| dewey-search | 620 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| spelling | Krause, Andreas 1981- Verfasser (DE-588)1058355988 aut Ultrathin calcium titanate capacitors physics and application Andreas Krause Berlin Logos-Verl. 2014 VIII, 149 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Research at NaMLab 3 Zugl.: Dresden, Techn. Univ., Diss., 2014 Zsfassung in dt. Sprache Kondensator (DE-588)4128311-9 gnd rswk-swf Metall-Isolator-Metall-System (DE-588)4249723-1 gnd rswk-swf Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf Perowskit (DE-588)4173836-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Dielektrische Schicht (DE-588)4194257-7 s Perowskit (DE-588)4173836-6 s Kondensator (DE-588)4128311-9 s Metall-Isolator-Metall-System (DE-588)4249723-1 s DE-604 Research at NaMLab 3 (DE-604)BV039853060 3 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4706725&prov=M&dok_var=1&dok_ext=htm Inhaltstext DE-601 pdf/application http://www.gbv.de/dms/tib-ub-hannover/790673932.pdf Inhaltsverzeichnis DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027729690&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Krause, Andreas 1981- Ultrathin calcium titanate capacitors physics and application Research at NaMLab Kondensator (DE-588)4128311-9 gnd Metall-Isolator-Metall-System (DE-588)4249723-1 gnd Dielektrische Schicht (DE-588)4194257-7 gnd Perowskit (DE-588)4173836-6 gnd |
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| title | Ultrathin calcium titanate capacitors physics and application |
| title_auth | Ultrathin calcium titanate capacitors physics and application |
| title_exact_search | Ultrathin calcium titanate capacitors physics and application |
| title_full | Ultrathin calcium titanate capacitors physics and application Andreas Krause |
| title_fullStr | Ultrathin calcium titanate capacitors physics and application Andreas Krause |
| title_full_unstemmed | Ultrathin calcium titanate capacitors physics and application Andreas Krause |
| title_short | Ultrathin calcium titanate capacitors |
| title_sort | ultrathin calcium titanate capacitors physics and application |
| title_sub | physics and application |
| topic | Kondensator (DE-588)4128311-9 gnd Metall-Isolator-Metall-System (DE-588)4249723-1 gnd Dielektrische Schicht (DE-588)4194257-7 gnd Perowskit (DE-588)4173836-6 gnd |
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