Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films: [held October 20 - 24, 1986, in San Diego, Calif.]
Gespeichert in:
| Körperschaft: | |
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| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Pennington, NJ
1987
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| Schriftenreihe: | Proceedings / Electrochemical Society
87,10 |
| Schlagworte: |
Internformat
MARC
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| 111 | 2 | |a Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |n 2 |d 1986 |c San Diego, Calif. |j Verfasser |0 (DE-588)5061664-X |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |b [held October 20 - 24, 1986, in San Diego, Calif.] |c ed. by Vik J. Kapoor ... |
| 264 | 1 | |a Pennington, NJ |c 1987 | |
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| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings / Electrochemical Society |v 87,10 | |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
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Datensatz im Suchindex
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| author2 | Kapoor, Vik J. |
| author2_role | edt |
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| author_corporate | Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films San Diego, Calif |
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| author_facet | Kapoor, Vik J. Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films San Diego, Calif |
| author_sort | Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films San Diego, Calif |
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| bvnumber | BV024403310 |
| ctrlnum | (OCoLC)916466414 (DE-599)BVBBV024403310 |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-09T21:58:53Z |
| institution | BVB |
| institution_GND | (DE-588)5061664-X |
| language | Undetermined |
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| publishDate | 1987 |
| publishDateSearch | 1987 |
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| series2 | Proceedings / Electrochemical Society |
| spelling | Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 2 1986 San Diego, Calif. Verfasser (DE-588)5061664-X aut Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] ed. by Vik J. Kapoor ... Pennington, NJ 1987 txt rdacontent n rdamedia nc rdacarrier Proceedings / Electrochemical Society 87,10 Siliciumnitrid (DE-588)4127841-0 gnd rswk-swf Siliciumdioxid (DE-588)4077447-8 gnd rswk-swf Isolierschicht (DE-588)4147018-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Siliciumnitrid (DE-588)4127841-0 s Siliciumdioxid (DE-588)4077447-8 s Isolierschicht (DE-588)4147018-7 s 1\p DE-604 Kapoor, Vik J. edt Electrochemical Society Proceedings 87,10 (DE-604)BV001900941 87,10 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] Siliciumnitrid (DE-588)4127841-0 gnd Siliciumdioxid (DE-588)4077447-8 gnd Isolierschicht (DE-588)4147018-7 gnd |
| subject_GND | (DE-588)4127841-0 (DE-588)4077447-8 (DE-588)4147018-7 (DE-588)1071861417 |
| title | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] |
| title_auth | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] |
| title_exact_search | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] |
| title_full | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] ed. by Vik J. Kapoor ... |
| title_fullStr | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] ed. by Vik J. Kapoor ... |
| title_full_unstemmed | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.] ed. by Vik J. Kapoor ... |
| title_short | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |
| title_sort | proceedings of the symposium on silicon nitride and silicon dioxide thin insulating films held october 20 24 1986 in san diego calif |
| title_sub | [held October 20 - 24, 1986, in San Diego, Calif.] |
| topic | Siliciumnitrid (DE-588)4127841-0 gnd Siliciumdioxid (DE-588)4077447-8 gnd Isolierschicht (DE-588)4147018-7 gnd |
| topic_facet | Siliciumnitrid Siliciumdioxid Isolierschicht Konferenzschrift |
| volume_link | (DE-604)BV001900941 |
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