Ätzverfahren für die Mikrotechnik:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | German |
| Veröffentlicht: |
Weinheim
Wiley-VCH
© 1998
1998 |
| Schlagworte: | |
| Online-Zugang: | FHR01 FRO01 UBG01 Volltext |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 Online-Ressource (1 online resource (xvi, 398 pages)) |
| ISBN: | 3527288694 9783527288694 3527602917 9783527602919 |
Internformat
MARC
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| 100 | 1 | |a Köhler, J. M. |d 1956- |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Ätzverfahren für die Mikrotechnik |c Michael Köhler |
| 264 | 1 | |a Weinheim |b Wiley-VCH |c © 1998 | |
| 264 | 1 | |c 1998 | |
| 300 | |a 1 Online-Ressource (1 online resource (xvi, 398 pages)) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Industrial Chemistry | |
| 650 | 7 | |a Masks (Electronics) |2 fast | |
| 650 | 7 | |a Microlithography |2 fast | |
| 650 | 7 | |a Plasma etching |2 fast | |
| 650 | 4 | |a Masks (Electronics) | |
| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Plasma etching | |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 1 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 710 | 2 | |a John Wiley & Sons |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u https://onlinelibrary.wiley.com/doi/book/10.1002/3527602917 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
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Datensatz im Suchindex
| _version_ | 1804176393632743424 |
|---|---|
| any_adam_object | |
| author | Köhler, J. M. 1956- |
| author_facet | Köhler, J. M. 1956- |
| author_role | aut |
| author_sort | Köhler, J. M. 1956- |
| author_variant | j m k jm jmk |
| building | Verbundindex |
| bvnumber | BV043648131 |
| collection | ZDB-35-WIC |
| ctrlnum | (ZDB-35-WIC)ocm85820380 (OCoLC)85820380 (DE-599)BVBBV043648131 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043648131 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:31:28Z |
| institution | BVB |
| isbn | 3527288694 9783527288694 3527602917 9783527602919 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029061779 |
| oclc_num | 85820380 |
| open_access_boolean | |
| owner | DE-861 DE-898 DE-BY-UBR |
| owner_facet | DE-861 DE-898 DE-BY-UBR |
| physical | 1 Online-Ressource (1 online resource (xvi, 398 pages)) |
| psigel | ZDB-35-WIC UBG_PDA_WIC ZDB-35-WIC FHR_PDA_WIC ZDB-35-WIC FRO_PDA_WIC ZDB-35-WIC UBG_PDA_WIC |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Köhler, J. M. 1956- Verfasser aut Ätzverfahren für die Mikrotechnik Michael Köhler Weinheim Wiley-VCH © 1998 1998 1 Online-Ressource (1 online resource (xvi, 398 pages)) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Industrial Chemistry Masks (Electronics) fast Microlithography fast Plasma etching fast Masks (Electronics) Microlithography Plasma etching Ätzen (DE-588)4000648-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Ätzen (DE-588)4000648-7 s 1\p DE-604 John Wiley & Sons Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/3527602917 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Köhler, J. M. 1956- Ätzverfahren für die Mikrotechnik Industrial Chemistry Masks (Electronics) fast Microlithography fast Plasma etching fast Masks (Electronics) Microlithography Plasma etching Ätzen (DE-588)4000648-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4221617-5 |
| title | Ätzverfahren für die Mikrotechnik |
| title_auth | Ätzverfahren für die Mikrotechnik |
| title_exact_search | Ätzverfahren für die Mikrotechnik |
| title_full | Ätzverfahren für die Mikrotechnik Michael Köhler |
| title_fullStr | Ätzverfahren für die Mikrotechnik Michael Köhler |
| title_full_unstemmed | Ätzverfahren für die Mikrotechnik Michael Köhler |
| title_short | Ätzverfahren für die Mikrotechnik |
| title_sort | atzverfahren fur die mikrotechnik |
| topic | Industrial Chemistry Masks (Electronics) fast Microlithography fast Plasma etching fast Masks (Electronics) Microlithography Plasma etching Ätzen (DE-588)4000648-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Industrial Chemistry Masks (Electronics) Microlithography Plasma etching Ätzen Mikrosystemtechnik |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/3527602917 |
| work_keys_str_mv | AT kohlerjm atzverfahrenfurdiemikrotechnik AT johnwileysons atzverfahrenfurdiemikrotechnik |