Silicon micromachining:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Cambridge
Cambridge Univ. Press
1998
|
| Ausgabe: | 1. publ. |
| Schriftenreihe: | Cambridge studies in semiconductor physics and microelectronic engineering
7 |
| Schlagworte: | |
| Beschreibung: | XIII, 405 S. Ill., graph. Darst. |
| ISBN: | 052159054X |
Internformat
MARC
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|---|---|---|---|
| 001 | BV012779251 | ||
| 003 | DE-604 | ||
| 005 | 20000802 | ||
| 007 | t | ||
| 008 | 990927s1998 ad|| |||| 00||| eng d | ||
| 020 | |a 052159054X |9 0-521-59054-X | ||
| 035 | |a (OCoLC)632699736 | ||
| 035 | |a (DE-599)BVBBV012779251 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
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| 082 | 0 | |a 621.3815 |2 21 | |
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| 100 | 1 | |a Elwenspoek, Miko |d 1949- |e Verfasser |0 (DE-588)12212183X |4 aut | |
| 245 | 1 | 0 | |a Silicon micromachining |c M. Elwenspoek and H. V. Jansen |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a Cambridge |b Cambridge Univ. Press |c 1998 | |
| 300 | |a XIII, 405 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Cambridge studies in semiconductor physics and microelectronic engineering |v 7 | |
| 650 | 4 | |a Etching | |
| 650 | 4 | |a Micromachining | |
| 650 | 4 | |a Silicon | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 1 | 1 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 1 | 2 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Jansen, Henri V. |e Verfasser |4 aut | |
| 830 | 0 | |a Cambridge studies in semiconductor physics and microelectronic engineering |v 7 |w (DE-604)BV009142123 |9 7 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008691055 | ||
Datensatz im Suchindex
| _version_ | 1804127449398640640 |
|---|---|
| any_adam_object | |
| author | Elwenspoek, Miko 1949- Jansen, Henri V. |
| author_GND | (DE-588)12212183X |
| author_facet | Elwenspoek, Miko 1949- Jansen, Henri V. |
| author_role | aut aut |
| author_sort | Elwenspoek, Miko 1949- |
| author_variant | m e me h v j hv hvj |
| building | Verbundindex |
| bvnumber | BV012779251 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.15.S55 |
| callnumber-search | TK7871.15.S55 |
| callnumber-sort | TK 47871.15 S55 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UQ 2800 ZN 4980 |
| ctrlnum | (OCoLC)632699736 (DE-599)BVBBV012779251 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. publ. |
| format | Book |
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| id | DE-604.BV012779251 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:33:31Z |
| institution | BVB |
| isbn | 052159054X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008691055 |
| oclc_num | 632699736 |
| open_access_boolean | |
| owner | DE-703 DE-355 DE-BY-UBR |
| owner_facet | DE-703 DE-355 DE-BY-UBR |
| physical | XIII, 405 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Cambridge Univ. Press |
| record_format | marc |
| series | Cambridge studies in semiconductor physics and microelectronic engineering |
| series2 | Cambridge studies in semiconductor physics and microelectronic engineering |
| spelling | Elwenspoek, Miko 1949- Verfasser (DE-588)12212183X aut Silicon micromachining M. Elwenspoek and H. V. Jansen 1. publ. Cambridge Cambridge Univ. Press 1998 XIII, 405 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cambridge studies in semiconductor physics and microelectronic engineering 7 Etching Micromachining Silicon Silicium (DE-588)4077445-4 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Silicium (DE-588)4077445-4 s Ätzen (DE-588)4000648-7 s DE-604 Mikromechanik (DE-588)4205811-9 s Jansen, Henri V. Verfasser aut Cambridge studies in semiconductor physics and microelectronic engineering 7 (DE-604)BV009142123 7 |
| spellingShingle | Elwenspoek, Miko 1949- Jansen, Henri V. Silicon micromachining Cambridge studies in semiconductor physics and microelectronic engineering Etching Micromachining Silicon Silicium (DE-588)4077445-4 gnd Mikromechanik (DE-588)4205811-9 gnd Ätzen (DE-588)4000648-7 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4205811-9 (DE-588)4000648-7 |
| title | Silicon micromachining |
| title_auth | Silicon micromachining |
| title_exact_search | Silicon micromachining |
| title_full | Silicon micromachining M. Elwenspoek and H. V. Jansen |
| title_fullStr | Silicon micromachining M. Elwenspoek and H. V. Jansen |
| title_full_unstemmed | Silicon micromachining M. Elwenspoek and H. V. Jansen |
| title_short | Silicon micromachining |
| title_sort | silicon micromachining |
| topic | Etching Micromachining Silicon Silicium (DE-588)4077445-4 gnd Mikromechanik (DE-588)4205811-9 gnd Ätzen (DE-588)4000648-7 gnd |
| topic_facet | Etching Micromachining Silicon Silicium Mikromechanik Ätzen |
| volume_link | (DE-604)BV009142123 |
| work_keys_str_mv | AT elwenspoekmiko siliconmicromachining AT jansenhenriv siliconmicromachining |