Measurement technology and intelligent instruments XI :: selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany /
Collection of selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2013), July 1-3, 2013, Aachen, Germany. The 60 papers are grouped as follows: Chapter 1: Metrology for SI, Chapter 2: Position & Displacement Metrology...
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| Weitere Verfasser: | , |
| Format: | Elektronisch Tagungsbericht E-Book |
| Sprache: | English |
| Veröffentlicht: |
Zürich, Switzerland :
Trans Tech Publications,
2014.
|
| Schriftenreihe: | Key engineering materials ;
v. 613. |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Zusammenfassung: | Collection of selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2013), July 1-3, 2013, Aachen, Germany. The 60 papers are grouped as follows: Chapter 1: Metrology for SI, Chapter 2: Position & Displacement Metrology, Chapter 3: Micro- and Nanometrology, Chapter 4: Macrometrology, Chapter 5: Optical Metrology, Chapter 6: Sensors and Actuators, Chapter 7: Material Properties' Characterization, Chapter 8: Intelligent Instruments for Automation, Chapter 9: Management of Measurement Processes, Chapter 10: Calibration and Machine Tool Performance, Chapter 11: Trends in Production Technology, Chapter 12: Measurements, Modeling and Simulation in the Humanitarian Field. |
| Beschreibung: | 1 online resource (491 pages) : illustrations |
| Bibliographie: | Includes bibliographical references at the end of each chapters and indexes. |
| ISBN: | 9783038264934 3038264938 |
| ISSN: | 1662-9795 ; 1662-9795 |
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| 245 | 1 | 0 | |a Measurement technology and intelligent instruments XI : |b selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / |c edited by Robert Schmitt and Harald Bosse. |
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| 504 | |a Includes bibliographical references at the end of each chapters and indexes. | ||
| 588 | 0 | |a Online resource; title from PDF title page (ebrary, viewed June 20, 2014). | |
| 520 | |a Collection of selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2013), July 1-3, 2013, Aachen, Germany. The 60 papers are grouped as follows: Chapter 1: Metrology for SI, Chapter 2: Position & Displacement Metrology, Chapter 3: Micro- and Nanometrology, Chapter 4: Macrometrology, Chapter 5: Optical Metrology, Chapter 6: Sensors and Actuators, Chapter 7: Material Properties' Characterization, Chapter 8: Intelligent Instruments for Automation, Chapter 9: Management of Measurement Processes, Chapter 10: Calibration and Machine Tool Performance, Chapter 11: Trends in Production Technology, Chapter 12: Measurements, Modeling and Simulation in the Humanitarian Field. | ||
| 505 | 0 | |a Measurement Technology and Intelligent Instruments XI; Editorial; Table of Contents; Chapter 1: Metrology for SI; Revision of the SI: The Determination of the Avogadro Constant as the Base for the Kilogram; Characterizing the New Sphere Interferometer for the Diameter Determination of the Avogadro Spheres; New Avogadro Spheres for the Redefinition of the Kilogram; Recommendations for Unified Rules for Key Comparison Evaluation; Chapter 2: Position & Displacement Metrology; Reproducibility of a Nanometre Accurate Moving-Scale Measurement System | |
| 505 | 8 | |a Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement SystemHighly-Stable Electronic Sensor Interface for Capacitive Position Measurement; Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer; Orthogonality Measurement of Cross-Grating Based on Image Processing of Multi-Order Diffraction Patterns; Research on a Long Travel Nanopositioning Air Bearing Stage with the Linear Motors; Chapter 3: Micro- and Nanometrology | |
| 505 | 8 | |a Changing Technology Requirements of Mask Metrology in Semiconductor IndustryAutomated Tool for Measuring Nanotopography of 300 mm Wafers at early Stages of Wafer Production; Full Scale Calibration of a Combined Tactile Contour and Roughness Measurement Device; A Virtual Instrument for SEM Uncertainty Analysis; Chapter 4: Macrometrology; Super-Large Gear Measurement Using Laser Tracker and CMM; Experimental Performance Study of Industrial-Grade Coordinate Measuring Machines Using a Calibrated Production Workpiece; Analysis of a Big Joint Implant | |
| 505 | 8 | |a High Stability of Temperature Control Using Vacuum Insulated Wall for Gauge Block MeasurementChapter 5: Optical Metrology; First Utilization of Energy Transfer in Structured Light Projection -- Infrared 3D Scanner; High Precision Algorithms for 3D Objects Shadow Inspection in Partially Coherent Light; Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle; Realization of Non-Mechanical Lateral and Axial Confocal Microscopic Laser Scanning with a Phase only Liquid Crystal Spatial Light Modulator | |
| 505 | 8 | |a An Approach to On-Line Uncertainty Evaluation in Non-Contact Temperature MeasurementsChapter 6: Sensors and Actuators; Design and Testing of Wind Energy Harvester Based on PVDF; Investigation of Energy Harvest Using a Piezoelectric Unimorph Post-Buckled by a Stretching Spring; Development of a Compact Deformable Mirror Using Push-Pull Actuators; Self-Diagnostics of Piezoelectric Transducers; Evaluation of the Transient Temperature Distribution of End-Face Sliding Friction Pair Using Infrared Thermometry; IEEE 1451-Based Sensor Interfacing and Data Fusion for Fire Smoke Detection | |
| 650 | 0 | |a Engineering instruments |v Congresses. | |
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| 776 | 0 | 8 | |i Print version: |a International Symposium on Measurement Technology and Intelligent Instruments (11th : 2013 : Aachen, Germany). |t Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany. |d Zürich, Switzerland : Trans Tech Publications, ©2014 |h 499 pages |k Key engineering materials ; Volume 613 |x 1662-9795 |z 9783038351122 |
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| contents | Measurement Technology and Intelligent Instruments XI; Editorial; Table of Contents; Chapter 1: Metrology for SI; Revision of the SI: The Determination of the Avogadro Constant as the Base for the Kilogram; Characterizing the New Sphere Interferometer for the Diameter Determination of the Avogadro Spheres; New Avogadro Spheres for the Redefinition of the Kilogram; Recommendations for Unified Rules for Key Comparison Evaluation; Chapter 2: Position & Displacement Metrology; Reproducibility of a Nanometre Accurate Moving-Scale Measurement System Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement SystemHighly-Stable Electronic Sensor Interface for Capacitive Position Measurement; Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer; Orthogonality Measurement of Cross-Grating Based on Image Processing of Multi-Order Diffraction Patterns; Research on a Long Travel Nanopositioning Air Bearing Stage with the Linear Motors; Chapter 3: Micro- and Nanometrology Changing Technology Requirements of Mask Metrology in Semiconductor IndustryAutomated Tool for Measuring Nanotopography of 300 mm Wafers at early Stages of Wafer Production; Full Scale Calibration of a Combined Tactile Contour and Roughness Measurement Device; A Virtual Instrument for SEM Uncertainty Analysis; Chapter 4: Macrometrology; Super-Large Gear Measurement Using Laser Tracker and CMM; Experimental Performance Study of Industrial-Grade Coordinate Measuring Machines Using a Calibrated Production Workpiece; Analysis of a Big Joint Implant High Stability of Temperature Control Using Vacuum Insulated Wall for Gauge Block MeasurementChapter 5: Optical Metrology; First Utilization of Energy Transfer in Structured Light Projection -- Infrared 3D Scanner; High Precision Algorithms for 3D Objects Shadow Inspection in Partially Coherent Light; Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle; Realization of Non-Mechanical Lateral and Axial Confocal Microscopic Laser Scanning with a Phase only Liquid Crystal Spatial Light Modulator An Approach to On-Line Uncertainty Evaluation in Non-Contact Temperature MeasurementsChapter 6: Sensors and Actuators; Design and Testing of Wind Energy Harvester Based on PVDF; Investigation of Energy Harvest Using a Piezoelectric Unimorph Post-Buckled by a Stretching Spring; Development of a Compact Deformable Mirror Using Push-Pull Actuators; Self-Diagnostics of Piezoelectric Transducers; Evaluation of the Transient Temperature Distribution of End-Face Sliding Friction Pair Using Infrared Thermometry; IEEE 1451-Based Sensor Interfacing and Data Fusion for Fire Smoke Detection |
| ctrlnum | (OCoLC)882265105 |
| dewey-full | 620.0044 |
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| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.0044 |
| dewey-search | 620.0044 |
| dewey-sort | 3620.0044 |
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| format | Electronic Conference Proceeding eBook |
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| genre_facet | Conference papers and proceedings |
| id | ZDB-4-EBA-ocn882265105 |
| illustrated | Illustrated |
| indexdate | 2024-10-25T16:22:05Z |
| institution | BVB |
| isbn | 9783038264934 3038264938 |
| issn | 1662-9795 ; 1662-9795 |
| language | English |
| oclc_num | 882265105 |
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| publishDate | 2014 |
| publishDateSearch | 2014 |
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| publisher | Trans Tech Publications, |
| record_format | marc |
| series | Key engineering materials ; |
| series2 | Key Engineering Materials, |
| spelling | International Symposium on Measurement Technology and Intelligent Instruments (11th : 2013 : Aachen, Germany) Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / edited by Robert Schmitt and Harald Bosse. Zürich, Switzerland : Trans Tech Publications, 2014. ©2014 1 online resource (491 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Key Engineering Materials, 1662-9795 ; Volume 613 Includes bibliographical references at the end of each chapters and indexes. Online resource; title from PDF title page (ebrary, viewed June 20, 2014). Collection of selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2013), July 1-3, 2013, Aachen, Germany. The 60 papers are grouped as follows: Chapter 1: Metrology for SI, Chapter 2: Position & Displacement Metrology, Chapter 3: Micro- and Nanometrology, Chapter 4: Macrometrology, Chapter 5: Optical Metrology, Chapter 6: Sensors and Actuators, Chapter 7: Material Properties' Characterization, Chapter 8: Intelligent Instruments for Automation, Chapter 9: Management of Measurement Processes, Chapter 10: Calibration and Machine Tool Performance, Chapter 11: Trends in Production Technology, Chapter 12: Measurements, Modeling and Simulation in the Humanitarian Field. Measurement Technology and Intelligent Instruments XI; Editorial; Table of Contents; Chapter 1: Metrology for SI; Revision of the SI: The Determination of the Avogadro Constant as the Base for the Kilogram; Characterizing the New Sphere Interferometer for the Diameter Determination of the Avogadro Spheres; New Avogadro Spheres for the Redefinition of the Kilogram; Recommendations for Unified Rules for Key Comparison Evaluation; Chapter 2: Position & Displacement Metrology; Reproducibility of a Nanometre Accurate Moving-Scale Measurement System Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement SystemHighly-Stable Electronic Sensor Interface for Capacitive Position Measurement; Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer; Orthogonality Measurement of Cross-Grating Based on Image Processing of Multi-Order Diffraction Patterns; Research on a Long Travel Nanopositioning Air Bearing Stage with the Linear Motors; Chapter 3: Micro- and Nanometrology Changing Technology Requirements of Mask Metrology in Semiconductor IndustryAutomated Tool for Measuring Nanotopography of 300 mm Wafers at early Stages of Wafer Production; Full Scale Calibration of a Combined Tactile Contour and Roughness Measurement Device; A Virtual Instrument for SEM Uncertainty Analysis; Chapter 4: Macrometrology; Super-Large Gear Measurement Using Laser Tracker and CMM; Experimental Performance Study of Industrial-Grade Coordinate Measuring Machines Using a Calibrated Production Workpiece; Analysis of a Big Joint Implant High Stability of Temperature Control Using Vacuum Insulated Wall for Gauge Block MeasurementChapter 5: Optical Metrology; First Utilization of Energy Transfer in Structured Light Projection -- Infrared 3D Scanner; High Precision Algorithms for 3D Objects Shadow Inspection in Partially Coherent Light; Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle; Realization of Non-Mechanical Lateral and Axial Confocal Microscopic Laser Scanning with a Phase only Liquid Crystal Spatial Light Modulator An Approach to On-Line Uncertainty Evaluation in Non-Contact Temperature MeasurementsChapter 6: Sensors and Actuators; Design and Testing of Wind Energy Harvester Based on PVDF; Investigation of Energy Harvest Using a Piezoelectric Unimorph Post-Buckled by a Stretching Spring; Development of a Compact Deformable Mirror Using Push-Pull Actuators; Self-Diagnostics of Piezoelectric Transducers; Evaluation of the Transient Temperature Distribution of End-Face Sliding Friction Pair Using Infrared Thermometry; IEEE 1451-Based Sensor Interfacing and Data Fusion for Fire Smoke Detection Engineering instruments Congresses. Measuring instruments Congresses. Ingénierie Instruments Congrès. Mesure Instruments Congrès. TECHNOLOGY & ENGINEERING Engineering (General) bisacsh TECHNOLOGY & ENGINEERING Reference. bisacsh Engineering instruments fast Measuring instruments fast Conference papers and proceedings fast Schmitt, Robert (Engineer), editor. Bosse, Harald, editor. http://id.loc.gov/authorities/names/no2007088941 has work: Measurement technology and intelligent instruments XI (Text) https://id.oclc.org/worldcat/entity/E39PCGgpQvx4kJvw8hHDWVPwvd https://id.oclc.org/worldcat/ontology/hasWork Print version: International Symposium on Measurement Technology and Intelligent Instruments (11th : 2013 : Aachen, Germany). Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany. Zürich, Switzerland : Trans Tech Publications, ©2014 499 pages Key engineering materials ; Volume 613 1662-9795 9783038351122 Key engineering materials ; v. 613. http://id.loc.gov/authorities/names/no99072054 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=792219 Volltext CBO01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=792219 Volltext |
| spellingShingle | Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / Key engineering materials ; Measurement Technology and Intelligent Instruments XI; Editorial; Table of Contents; Chapter 1: Metrology for SI; Revision of the SI: The Determination of the Avogadro Constant as the Base for the Kilogram; Characterizing the New Sphere Interferometer for the Diameter Determination of the Avogadro Spheres; New Avogadro Spheres for the Redefinition of the Kilogram; Recommendations for Unified Rules for Key Comparison Evaluation; Chapter 2: Position & Displacement Metrology; Reproducibility of a Nanometre Accurate Moving-Scale Measurement System Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement SystemHighly-Stable Electronic Sensor Interface for Capacitive Position Measurement; Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer; Orthogonality Measurement of Cross-Grating Based on Image Processing of Multi-Order Diffraction Patterns; Research on a Long Travel Nanopositioning Air Bearing Stage with the Linear Motors; Chapter 3: Micro- and Nanometrology Changing Technology Requirements of Mask Metrology in Semiconductor IndustryAutomated Tool for Measuring Nanotopography of 300 mm Wafers at early Stages of Wafer Production; Full Scale Calibration of a Combined Tactile Contour and Roughness Measurement Device; A Virtual Instrument for SEM Uncertainty Analysis; Chapter 4: Macrometrology; Super-Large Gear Measurement Using Laser Tracker and CMM; Experimental Performance Study of Industrial-Grade Coordinate Measuring Machines Using a Calibrated Production Workpiece; Analysis of a Big Joint Implant High Stability of Temperature Control Using Vacuum Insulated Wall for Gauge Block MeasurementChapter 5: Optical Metrology; First Utilization of Energy Transfer in Structured Light Projection -- Infrared 3D Scanner; High Precision Algorithms for 3D Objects Shadow Inspection in Partially Coherent Light; Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle; Realization of Non-Mechanical Lateral and Axial Confocal Microscopic Laser Scanning with a Phase only Liquid Crystal Spatial Light Modulator An Approach to On-Line Uncertainty Evaluation in Non-Contact Temperature MeasurementsChapter 6: Sensors and Actuators; Design and Testing of Wind Energy Harvester Based on PVDF; Investigation of Energy Harvest Using a Piezoelectric Unimorph Post-Buckled by a Stretching Spring; Development of a Compact Deformable Mirror Using Push-Pull Actuators; Self-Diagnostics of Piezoelectric Transducers; Evaluation of the Transient Temperature Distribution of End-Face Sliding Friction Pair Using Infrared Thermometry; IEEE 1451-Based Sensor Interfacing and Data Fusion for Fire Smoke Detection Engineering instruments Congresses. Measuring instruments Congresses. Ingénierie Instruments Congrès. Mesure Instruments Congrès. TECHNOLOGY & ENGINEERING Engineering (General) bisacsh TECHNOLOGY & ENGINEERING Reference. bisacsh Engineering instruments fast Measuring instruments fast |
| title | Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / |
| title_auth | Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / |
| title_exact_search | Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / |
| title_full | Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / edited by Robert Schmitt and Harald Bosse. |
| title_fullStr | Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / edited by Robert Schmitt and Harald Bosse. |
| title_full_unstemmed | Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / edited by Robert Schmitt and Harald Bosse. |
| title_short | Measurement technology and intelligent instruments XI : |
| title_sort | measurement technology and intelligent instruments xi selected peer reviewed papers from the 11th international symposium on measurement technology and intelligent instruments ismtii 2013 july 1 3 2013 aachen germany |
| title_sub | selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / |
| topic | Engineering instruments Congresses. Measuring instruments Congresses. Ingénierie Instruments Congrès. Mesure Instruments Congrès. TECHNOLOGY & ENGINEERING Engineering (General) bisacsh TECHNOLOGY & ENGINEERING Reference. bisacsh Engineering instruments fast Measuring instruments fast |
| topic_facet | Engineering instruments Congresses. Measuring instruments Congresses. Ingénierie Instruments Congrès. Mesure Instruments Congrès. TECHNOLOGY & ENGINEERING Engineering (General) TECHNOLOGY & ENGINEERING Reference. Engineering instruments Measuring instruments Conference papers and proceedings |
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