Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams: 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Institute of Physics
1992
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| Schriftenreihe: | Journal of vacuum science and technology / B
10,6 |
| Schlagworte: | |
| Beschreibung: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Beschreibung: | S. 2495 - 3259 graph. Darst. |
Internformat
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| 111 | 2 | |a International Symposium on Electron, Ion and Photon Beams |n 36 |d 1992 |c Orlando, Fla. |j Verfasser |0 (DE-588)3015496-0 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams |b 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida |c special ed. for the proceedings: Randy Kubena |
| 264 | 1 | |a New York |b American Institute of Physics |c 1992 | |
| 300 | |a S. 2495 - 3259 |b graph. Darst. | ||
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| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science and technology / B |v 10,6 | |
| 500 | |a Stücktitelaufnahme zu e. Zeitschriftenh. | ||
| 650 | 4 | |a Ion beam lithography |v Congresses | |
| 650 | 4 | |a Lithography, Electron beam |v Congresses | |
| 650 | 4 | |a Photolithography |v Congresses | |
| 650 | 4 | |a Photoresists |v Congresses | |
| 650 | 4 | |a X-ray lithography |v Congresses | |
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Datensatz im Suchindex
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| id | DE-604.BV009012355 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:28:33Z |
| institution | BVB |
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| language | English |
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| physical | S. 2495 - 3259 graph. Darst. |
| publishDate | 1992 |
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| publisher | American Institute of Physics |
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| series2 | Journal of vacuum science and technology / B |
| spelling | International Symposium on Electron, Ion and Photon Beams 36 1992 Orlando, Fla. Verfasser (DE-588)3015496-0 aut Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida special ed. for the proceedings: Randy Kubena New York American Institute of Physics 1992 S. 2495 - 3259 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 10,6 Stücktitelaufnahme zu e. Zeitschriftenh. Ion beam lithography Congresses Lithography, Electron beam Congresses Photolithography Congresses Photoresists Congresses X-ray lithography Congresses Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Elektronenstrahl (DE-588)4151894-9 gnd rswk-swf Photonenstrahl (DE-588)4418284-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Orlando Fla. gnd-content Photonenstrahl (DE-588)4418284-3 s DE-604 Ionenstrahl (DE-588)4162347-2 s Elektronenstrahl (DE-588)4151894-9 s Kubena, Randy Sonstige oth |
| spellingShingle | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida Ion beam lithography Congresses Lithography, Electron beam Congresses Photolithography Congresses Photoresists Congresses X-ray lithography Congresses Ionenstrahl (DE-588)4162347-2 gnd Elektronenstrahl (DE-588)4151894-9 gnd Photonenstrahl (DE-588)4418284-3 gnd |
| subject_GND | (DE-588)4162347-2 (DE-588)4151894-9 (DE-588)4418284-3 (DE-588)1071861417 |
| title | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida |
| title_auth | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida |
| title_exact_search | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida |
| title_full | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida special ed. for the proceedings: Randy Kubena |
| title_fullStr | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida special ed. for the proceedings: Randy Kubena |
| title_full_unstemmed | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida special ed. for the proceedings: Randy Kubena |
| title_short | Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams |
| title_sort | proceedings of the 36th international symposium on electron ion and photon beams 26 29 may 1992 the peabody hotel orlando florida |
| title_sub | 26 - 29 May 1992, The Peabody Hotel, Orlando, Florida |
| topic | Ion beam lithography Congresses Lithography, Electron beam Congresses Photolithography Congresses Photoresists Congresses X-ray lithography Congresses Ionenstrahl (DE-588)4162347-2 gnd Elektronenstrahl (DE-588)4151894-9 gnd Photonenstrahl (DE-588)4418284-3 gnd |
| topic_facet | Ion beam lithography Congresses Lithography, Electron beam Congresses Photolithography Congresses Photoresists Congresses X-ray lithography Congresses Ionenstrahl Elektronenstrahl Photonenstrahl Konferenzschrift 1992 Orlando Fla. |
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