Proceedings of the First International Symposium on Diamond and Diamond-Like Films:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
1989
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| Schriftenreihe: | Electrochemical Society: Proceedings
89,12 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XI, 679 Ill., graph. Darst. |
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| adam_text | IMAGE 1
PROCEEDINGS OF THE FIRST INTERNATIONAL SYMPOSIUM ON
DIAMOND AND DIAMOND-LIKE FILMS
EDITED BY
J. P. DISMUKES
EXXON RESEARCH AND ENGINEERING ANNADALE, NEW JERSEY
A. J. PURDES
TEXAS INSTRUMENTS INC. DALLAS, TEXAS
B. S. MEYERSON IBM T.J.WATSON RESEARCH CENTER YORKTOWN HEIGHTS, NEW YORK
T. D. MOUSTAKAS
BOSTON UNIVERSITY BOSTON, MASSACHUSETTS
K. E. SPEAR PENNSYLVANIA STATE UNIVERSITY UNIVERSITY PARK, PENNSYLVANIA
K. V. RAVI
LOCKHEED MISSILES AND SPACE COMPANY PALO ALTO, CALIFORNIA
M. YODER OFFICE OF NAVAL RESEARCH
ARLINGTON, VIRGINIA TIB/UB HANNOVER 89 129 942 324
UNIVERSITY 7 UFIUOTHEK
*MJORHB ,
DIELECTRICS AND INSULATION, ELECTRONICS, AND HIGH TEMPERATURE MATERIALS
DIVISIONS
PROCEEDINGS VOLUME 89-12
THE ELECTROCHEMICAL SOCIETY, INC., 10 SOUTH MAIN ST., PENNINGTON, NJ
08534-2896
IMAGE 2
CONTENTS
SECTION PAGE
PREFACE LII
HISTORY AND CURRENT STATUS OF DIAMOND GROWTH AT METASTABLE CONDITIONS J.
C. ANGUS 1
TECHNOLOGICAL APPLICATION OF CVD DIAMOND A. HARA AND N. FUJIMORI 14
SILICON ON INSULATOR TECHNOLOGY USING CVD DIAMOND FILMS K. V. RAVI AND
M. I. LANDSTRASS 24
P-TYPE DIAMOND STRIPPER FOILS FOR TANDEM ION ACCELERATORS A. W. PHELPS
AND R. KOBA 38
DEVELOPMENT OF CVD DIAMOND SYNTHESIS TECHNIQUES S. MATSUMOTO 50
EFFECTS OF PROCESS PARAMETERS ON CVD DIAMOND FILMS W. ZHU, R, MESSIER,
AND A. R. BADZIAN 61
THE SYNTHESIS OF HIGH QUALITY DIAMOND IN COMBUSTION FLAME Y. HIROSE, S.
AMANUMA, N. OKADA, AND K. KOMAKI 80
SYNTHESIS OF DIAMOND FILM BY ARC DISCHARGE PLASMA CVD
N. OHTAKE, H. TOKURA, Y. KURIYAMA, Y. MASHIINO, AND M. YOSHIKAWA 93
A NEW LASER/PIASMA ABLATION TECHNIQUE FOR THE DEPOSTION OF HARD,
DIAMOND-LIKE FILMS J. KRISHNASWAMY, A. RENGAN, AND J. NARAYAN 106
DIAMOND GROWTH USING PLASMAS FORMED WITH DIELEGTRICALLY GUIDED
MICROWAVES M. AKLUFI AND D. BROCK 114
MECHANISMS OF NUCLEATION AND GROWTH OF CVD DIAMOND K. E. SPEAR AND M.
FRENKLACH 122
SELECTED-AREA DEPOSITION OF CVD DIAMOND FILMS K. KOBASHI, K, MIYATA, K.
KUMAGAI, A. NAKAUE, H, TAOHIBANA, T. INOUE, AND Y. KAWATE 139
VII
IMAGE 3
SELECTIVE NUCLEATIONS OF DIAMOND PARTICLES BY PLASMA-ASSISTED CVD J. S.
MA, H. KAWARADA, T. YONEHARA, J.-I. SUZUKI, J. WEI, Y. YOKOTA, AND A.
HIRAKI 149
PHYSICAL AND CHEMICAL PROPERTIES OF CHEMICAL VAPOR DEPOSITED (CVD)
DIAMOND A. FELDMAN, L. H. ROBINS, H. P. R. FREDERIKSE, E. N. FARABOUGH
AND E. ETZ 162
RAMAN AND FTIR STUDIES OF THE SPATIAL UNIFORMITY OF THE DIAMOND FILMS G.
SHERGILL, J. N. COX, J. R. CARRUTHERS AND L. S. PIANO 173
THOMAS D. CALLINAN AWARD PRESENTATION: CHARACTERIZATION OF BORON NITRIDE
FILMS FOR SYNCHROTRON X-RAY MASKS R. A. LEVY 182
MICROSTRUCTURAL CHARACTERIZATION OF DIAMOND THIN FILMS B. E. WILLIAMS,
J. T. GLASS, R. F. DAVIS, K. KOBASHI, AND K. L, MORE 202
MICROSTRUCTURAL FEATURES OF DIAMOND FILMS ON (100) SI SUBSTRATES A. R.
SRIVATSA, J. NARAYAN, AND K. V. RAVI 215
PROPERTIES AND MICROSTRUCTURE OF METAL CONTAINING A-C:H FILMS C.-P.
KLAGES, H. KOBERLE, M. BAUER, AND R. MEMMING 225
CRITICAL ASSESSMENT OF DIAMONDLIKE CARBON P. KOIDL 237
DIAMOND-LIKE CARBON FILMS AS A PROTECTIVE COATING FOR ZNS AND ZNSE
OPTICS J. KEELEY AND R. L. C. WU 250
DIAMOND FILMS FOR ANTIREFLECTION COATING OF SI INFRARED DETECTORS A. L.
LIN, M. G. STAPELBROEK, K. V. RAVI 261
AND M. PETERS
OPTICAL PROPERTIES AND OPTOELECTRONIC APPLICATIONS OF DIAMOND J. I.
PANKOVE 269
OPTICAL AND STRUCTURAL CHARACTERIZATION OF CVD DIAMOND CH. WILD, N.
HERRES, J. WAGNER, P. KOIDL, AND T. R, ANTHONY 283
VILL
IMAGE 4
CVD SYNTHESIS OF (110)-ORIENTED BILAYER DIAMOND FILMS K. KOBASHI, K.
NISBIMURA, K. MIYATA, K. KUMAGAI, AND Y. KAWATE 296
DIELECTRIC PROPERTIES OF CARBON FILMS FROM PLASMA-ENHANCED CHEMICAL
VAPOR DEPOSITION J. L. DAVIDSON AND T. A. ROPPEL 306
VAPOR PHASE DIAGNOSTICS IN CVD DIAMOND DEPOSITION J. E. BUTLER AND F. G.
CSLII 317
CARS DIAGNOSTIS AND ANALYSIS OF SPECIES IN PACVD DIAMOND DEPOSITION
PROCESS W. C. ROMAN AND M. B. COLKET III 330
PLASMA CHEMISTRY IN DIAMOND DEPOSITION A. INSPEKTOR, T. MCKENNA, Y.
LIOU, L.BOURGET, K. E. SPEAR, AND R. MESSIER 342
INTERFACE PROPERTIES OF HYDROGENATED AMORPHOUS CARBON FILMS ON GE(100)
SURFACES M. WITTMER, D. UGOLITII, AND P. OELHAFEN 353
THE IMPACT OF DEPOSITION PARAMETERS ON THE THERMAL CONDUCTIVITY OF CVD
THIN DIAMOND FILMS J. A. HERB, C. BAILEY, K. V. RAVI AND P. A. DENNING
366
OXIDATION OF DC CVD DIAMOND FILMS L. S, PIANO, S. YOKOTA, AND K. V. RAVI
380
EFFECTS OF PLASMA PARAMETER ON DIAMOND DEPOSTION AT LOWER PRESSURE USING
MAGNETO-MICROWAVE PLASMA CVD J. WEI, H. KAWARADA, J.-I. SUZUKI, K.
YANAGIHARA K. NUMATA, AND A. HIRAKI 393
DEVICE APPLICATIONS OF DIAMOND M. W. GEIS 404
DIAMOND: A SEMICONDUCTOR FOR HIGH-TEMPERATURE AND HIGH-POWER ELECTRONICS
K. SHENAI, AND B, J. BALIGA 405
ELECTRICAL CONDUCTIVITY STUDIES IN DIAMOND THIN FILMS J. MORT, M.
MACHONKIN, M. MORGAN, F. JANSEN, K. OKUMURA, AND R, J. HEMANICH 420
IX
IMAGE 5
CARRIER MOBILITIES AND LIFETIMES IN PECVD AND NATURAL DIAMOND
PHOTOCONDUCTORS L. S. PAN, P. PIANETTA, D. R. KANIA, 0. L. LANDEN,
K. V. RAVI AND L. S. PIANO 424
ELECTRONIC AND CRYSTALLOGRAPHIC INTEGRITY OF LOW PRESSURE CHEMICAL VAPOR
DEPOSITION HOMOEPITAXIAL DIAMOND H. G. MAGUIRE, T. E. DERRY, J. P. F.
SELLSCHOP
AND M. KAMO 434
RESISTIVITY OF METAL CONTACTS TO DIAMOND K. L. MOAZED, J. R. ZEIDLER, M.
J. TAYLOR, C. R. ZEISSE, AND R. NGUYEN 446
EFFECT OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF DLC FILMS
DEPOSITED BY LASER ABLATION A. RENGAN, A. R. SRIVATSA, J. KRISHNASWARAY,
J. NARAYAN K. VEDAM, K. V. RAVI, AND M. A. CAOLO 456
DEPOSITION OF DIAMOND BY HOT FILAMENT AND DC-PLASMA CO-ENHANCEMENT CVD
N. FUJIMORI, A. IKEGAYA, T. IMAI, K. FUKUSBIRAA, AND N. OHTA 465
TRIBOLOGICAL BEHAVIOR OF CVD DIAMOND FILMS M. N. GARDOS AND K. V. RAVI
475
R. F. PLASMA CVD OF DIAMOND FROM H2/CH4, H2/CO AND H2/CH4/O2 SOURCE
GASES D. E. MEYER, R. 0. DILLON, AND J. A. WOOLLANT 494
DIAMOND GROWTH IN A MICROWAVE PLASMA D. M. TUNG, W. L. HSU, AND K. F.
MCCARTY 500
CVD GROWTH OF DIAMOND: THE MULTIPLE ROLE OF ATOMIC HYDROGEN G. JANSSEN,
W. J. P. VAN ENCKEVORT, AND L. J. GILING 508
THERMAL CONDUCTIVITY OF DIAMOND FILMS SYNTHESIZED BY MICROWAVE PLASMA
CVD A. NISHIKAWA, H. FUNAMOTO, A. ONO, AND T. BABA 524
ASPECTS OF FILAMENT-ASSISTED DEPOSITION OF POLYCRYSTALLINE DIAMOND F. M.
KIMOCK, D. S, HOOVER, D. GARG, P. N. DYER, R. L. IAMPIETRO, V. A. MONK
AND W. TSAI 536
X
IMAGE 6
A LASER PLASMA SOURCE OF AMORPHIC DIAMOND C. B. COLLINS, F. DAVANLOO, E.
M, JUENGERMAN, D. R. JANDER, AND T. J. LEE 543
THE PROPERTIES OF DIAMOND-LIKE CARBON FILMS PREPARED BY R. F. DISCHARGE
K. W. WHANG AND H. S. TAE 551
GROWTH KINETICS AND ITS EFFECTS ON PROPERTIES OF CARBON FILMS BY VAPOR
PHASE DEPOSITION TECHNIQUES C. DESHPANDEY, S. JOU, M. C. RADHAKRISHNA,
H. J. DOERR, AND R. F. BUNSHAH 559
METHYL REGENERATION: AN IMPORTANT ROLE FOR HYDROGEN ATOMS IN DIAMOND
FILMS SYNTHESIS L. R. MARTIN AND M. W. HILL 568
CARBIDE FORMATION DURING THE DEPOSITION OF A-C:H FILMS ONTO SILICON K.
G. TSCHERSICH 576
RAMAN MICROSPECTROSCOPY OF DIAMOND CRYSTALS AND THIN FILMS PREPARED BY
HOT FILAMENT ASSISTED CHEMICAL VAPOR DEPOSITION A. M. BONNOT 579
ON THE CONTROL OF DIAMOND DEPOSITION STRUCTURE AND MORPHOLOGY L.
VANDENBULCKE AND P. BOU 594
RAMAN INVESTIGATIONS ON DIAMOND FILMS AND CRYSTALS DEPOSITED BY
P.A.C.V.D. P. BOU AND L. VANDENBULCKE 610
THERMAL DIFFUSIVITY OF DIAMOND FILMS USING A LASER PULSE TECHNIQUE S.
ALBIN, W. P. WLNFREE, AND B. S. CREWS 630
ION-INDUCED SYNERGISTIC EFFECTS IN THE GROWTH OF AMORPHOUS CARBON FILMS
BY PACVD IN A MICROWAVE MULTIPOLAR PLASMA M. MORIN AND L. VANDENBULCKE
640
MANUFACTURING TECHNOLOGY ASSESSMENT FOR CVD DIAMOND COATING J. P.
DISMUKES AND K. R. WALTON 653
AUTHOR INDEX 667
KEYWORD INDEX 671
XI
|
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| physical | XI, 679 Ill., graph. Darst. |
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| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | International Symposium on Diamond and Diamond-Like Films 1 1989 Los Angeles, Calif. Verfasser (DE-588)3004548-4 aut Proceedings of the First International Symposium on Diamond and Diamond-Like Films ed. by J. P. Dismukes ... Diamond and Diamond-Like Films Pennington, NJ 1989 XI, 679 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 89,12 Diamond thin films Congresses Diamonds, Artificial Congresses (DE-588)1071861417 Konferenzschrift gnd-content Dismukes, J. P. Sonstige oth Electrochemical Society: Proceedings 89,12 (DE-604)BV001900941 89,12 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005962161&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Proceedings of the First International Symposium on Diamond and Diamond-Like Films Electrochemical Society: Proceedings Diamond thin films Congresses Diamonds, Artificial Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Proceedings of the First International Symposium on Diamond and Diamond-Like Films |
| title_alt | Diamond and Diamond-Like Films |
| title_auth | Proceedings of the First International Symposium on Diamond and Diamond-Like Films |
| title_exact_search | Proceedings of the First International Symposium on Diamond and Diamond-Like Films |
| title_full | Proceedings of the First International Symposium on Diamond and Diamond-Like Films ed. by J. P. Dismukes ... |
| title_fullStr | Proceedings of the First International Symposium on Diamond and Diamond-Like Films ed. by J. P. Dismukes ... |
| title_full_unstemmed | Proceedings of the First International Symposium on Diamond and Diamond-Like Films ed. by J. P. Dismukes ... |
| title_short | Proceedings of the First International Symposium on Diamond and Diamond-Like Films |
| title_sort | proceedings of the first international symposium on diamond and diamond like films |
| topic | Diamond thin films Congresses Diamonds, Artificial Congresses |
| topic_facet | Diamond thin films Congresses Diamonds, Artificial Congresses Konferenzschrift |
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