Proceedings: 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008
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| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Ilmenau
Verl. ISLE
2008
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| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | VII, 120 S. Ill., graph. Darst. |
| ISBN: | 9783938843383 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804138048454131712 |
|---|---|
| adam_text | CONTENTS
Page
Plenary Lecture
W.
Gao
3
Nanomeasuring
and nanopositioning technologies for precision nanomanufacturing
Session
1:
Nanomeasuring and Nanopositioning Technology
G.
Jäger,
E.
Manské,
T. Hausotte,
R.
Füßl,
H.
-J.
Büchner 7
Limits
of the precision engineering
K.-C. Fan; J.Y. Ke; B.K. Li
9
Design of a novel low-cost and long-stroke co-planar stage for nanopositioning
Invited Paper
G. Dai; F.
Pohlenz;
S.
Bütefisch; F. Härtig; H.-U. Danzebrink 11
Development
of
an
ultra precision
micro/nano
СММ
F. Härtig;
W.
Ehrig;
M.
Neugebauer;
U.
Neuschaefer-Rube;
M.
Wissmann 13
Measurement instruments and measurement objects for micro-CMMs
J.Y. Lee; W.T. Wu; C.C. Hsu; C.C. Wu; G. Lerondel
1 5
Quasi-common-path heterodyne grating interferometer
T. Elsarnagawy; M.T. El-Wakad
17
Effect of embedding type of fiber optic-based force sensor for dentistry:
Nano-strain analysis
Invited Paper
J.Hoffmann
19
Dimensional micro- and nanometrology by electrical probing
C.C. Wu; C.C. Hsu; J.Y. Lee; C.J. Chen
21
Common-path laser linear encoder with subnanometer resolution
G.
Schitter
23
Improving the Speed of SPM by Modern Control Methods
Invited Paper
K.
Hasche;
G.
Dai;
H.-J.
Büchner, F.
Pohlenz
25
Optimized metrological scanning force microscopes
T.
Machleidt;
D.
Kapusi;
E. Sparrer;
N.
Dorozhovets; E.
Manské; K.-H. Franke
27
Navigation in large measurement
volume
by using AFM technology as
sensorsystem
in the nanopositioning and nanomeasuring machine (NPMM)
L. Yu; W. Cheng
29
Calibration of an articulated coordinate measurement machine based on an
orthogonal CMM
III
L.C.
Chen;
J.C.
Chang;
S.L.
Yeh; A.M. Tapilouw;
H.W.
Lai
31
Development of new
3-D
surface profilometry using simultaneous phase shifting
interferometry
S.
Frank;
M.
Weiß;
M.
Braunschweig;
О.
Birli 33
PC-software modules for a NPM machine control system
Ph.
Kreutzer;
R.
Füßl; R. Grünwald 35
Monte
Carlo Simulation
to determine the measurement uncertainty of metrological
models for the nanomeasuring and nanopositioning machine
Poster Session
1 :
Nanomeasuring and Nanopositioning Technology
D.
Kapusi;
T.
Machleidt;
E.
Manské;
K.-H.
Franke; R.
Jahn 37
White light
interferometry,
a new application for the nanopositioning and
nanomeasuring machine
H.-J.
Büchner;
G.
Jäger 39
Standing wave based microinterferometer
0.
Bazylevych; Yu. Hirnyak; O. Ivakhiv; M. Nakonechnyi
41
Neural controller for designing nanopositioning systems
Session
2:
Measurement and Sensor Technology
A.
Weckenmann;
P.
Krämer 45
Application of computed tomography in manufacturing metrology
Invited Paper
C.H. Liu; W.Y. Jywe; H.L Huang; I.C Chen;
Т.Н.
Hsu; Y.R. Jeng; LL. Duan; M.S. Wang
47
The application of the dual-beam laser interferometer for calibration precision
machine tools
Invited Paper
W.
Holzapfel; N.
Mahdavi 51
High precision calibration and process monitoring of modern tool machines by
inerţial
sensing
S. Kurokawa; Y. Ariura; A. Bekki; Y. Matsukawa; T.
Doi
53
Application of angle measurement with sub-micro radian resolution to detect
nanometer engagement of a gear pair
Yu. Chugui
55
High performance optical measurement systems and laser technologies for
scientific and industrial applications
Invited Paper
IV
L.C.
Chen;
Y.S.
Shu; X.L. Nguyen
57
High speed
3-D
surface profilometry using HSI color model and trapezoidal
phase-shifting method
A.
Weckenmann; J.
Bernstein
59
Optical bi-sensorial measurement system for production control of extruded profiles
N.
Dorozhovets; T. Hausotte;
E. Manske; G.
Jäger 61
Novel investigations and developments in a metrological scanning probe microscope
F. Depiereux; G.F.
Mallmann; R. Schmitt 63
Fiber optic interferometer for distance measurements: investigation of linearity
Invited Paper
W.
Schott;
W.
Pöschel;
D. Dontsov; R.
Schüler; D. Schwenk 65
Novel high precision method for Leeb hardness measurements based on laser
interferometers
J. Niehues; P.
Lehmann 67
Extended low-coherence
interferometry
for high precision microscopic form
and surface measurement
Invited Paper
R.
Hocken;
K. Desiraju
69
Accurate measurement of spheres
Invited Paper
E. Garbusi; Ch. Pruss; W.
Osten 71
Process integrated measurement of aspherical surfaces
Invited Paper
C.C. Hsu; C.C. Wu; C.J. Chen; J.Y. Lee
73
Heterodyne displacement measurement with volume hologram as reflection
type optical ruler
Y.C. Wang; L.H. Shyu; W.Y. Jywe, J.C. Lin; B.Y. Lee; Y.F.
Teng
75
Fabrication and verification of Fabry-Perot interferometer utilized for displacement
measurements
J.
Lazar;
0.
Čip; M.
Čížek;
M. Šerý
77
Interferometrie
displacement measurement for local probe microscopy
F. Fang; Z.W. Xu
79
Configuration control of carbon nanotube probe by focused ion beam
Invited Paper
Th.
Fröhlich;
Th.
Fehling;
D. Heydenbluth
81
Mass dissemination using the Sartorius mass comparator robot system
L
Krause 83
Precision vibrator for force-sensors and load-cells
S.
Mäuselein; 0.
Mack; R. Schwartz;
G.
Jäger 85
Single
crystalline sensors with thin-film strain gauges for force measurement
and weighting technology
E.
Manské;
H.
Baitinger;
R. Mastylo;
N.
Dorozhovets; S. Sinzinger; G.
Jäger 87
Investigations for the improvement of optical edge detection with a laser focus probe
E. Shi; J. Guo; Y. Huang
89
Research on a novel method for measuring volumetric error of CMM
M. Dorozhovets
91
Investigation of the test samples method, used for the evaluation of measurement
result and its uncertainty
R.
Danzi;
F. Helmli; M.
Krystek;
M. Neugebauer
93
Sphere fitting algorithms with uncertainty estimation
Poster Session
2:
Measurement and Sensor Technology
Y.J. Huang; C.J. Chen; S.H. Wang; K.Y. Tsuei; H. Baitinger; Ch. Walter
95
Dynamic structure evaluation of isolating seismic block for primary vibration
calibration system
R.
Schmitt;
К.
Vielhaber 97
Automated in-situ
interferometrie
form testing
N.
Filippov
99
About cases of necessity of quantization on geometrical progressions
0.
Ivakhiv; V. Puyda; D. Puyda
101
Analysis of
3D
surfaces by computer vision system
V. Mazin; A. Chepushtanov
103
Properties and application technology of a vector-analytical method for an
estimation of uncertainty in measurement
1. Mykytyn; B. Stadnyk; S. Yatsyshyn
105
Methodical error mathematical models of one- and two-channel noise thermometers
Ya. Lutsyk; B. Stadnyk; S. Yatsyshyn
107
Metrologie
operating characteristics of thermoelectric transducers
O. Čip; Z. Buchta; M.
Čížek;
R.
Šmíd;
J.
Lazar
109
High-resolution laser interferometer with stabilized spatial position of laser beams
N.
Hofmann;
Α.
Dunkel;
G.
Jäger;
A. Tibrewala; A. Phataralaoba; S.
Büttgenbach 111
Investigations
of the metrological characteristics of
3D
micro probes on the basis
of structured silicon-membranes
VI
J.
Wurmus;
G.
Jäger;
R.
Grunwald;
E.
Manské;
M.
Röser 113
Microoptical fibre-coupled laser
interferometers and
multiparameter
microsensor
systems for use in precision engineering
List of Authors
117
VII
|
| adam_txt |
CONTENTS
Page
Plenary Lecture
W.
Gao
3
Nanomeasuring
and nanopositioning technologies for precision nanomanufacturing
Session
1:
Nanomeasuring and Nanopositioning Technology
G.
Jäger,
E.
Manské,
T. Hausotte,
R.
Füßl,
H.
-J.
Büchner 7
Limits
of the precision engineering
K.-C. Fan; J.Y. Ke; B.K. Li
9
Design of a novel low-cost and long-stroke co-planar stage for nanopositioning
Invited Paper
G. Dai; F.
Pohlenz;
S.
Bütefisch; F. Härtig; H.-U. Danzebrink 11
Development
of
an
ultra precision
micro/nano
СММ
F. Härtig;
W.
Ehrig;
M.
Neugebauer;
U.
Neuschaefer-Rube;
M.
Wissmann 13
Measurement instruments and measurement objects for micro-CMMs
J.Y. Lee; W.T. Wu; C.C. Hsu; C.C. Wu; G. Lerondel
1 5
Quasi-common-path heterodyne grating interferometer
T. Elsarnagawy; M.T. El-Wakad
17
Effect of embedding type of fiber optic-based force sensor for dentistry:
Nano-strain analysis
Invited Paper
J.Hoffmann
19
Dimensional micro- and nanometrology by electrical probing
C.C. Wu; C.C. Hsu; J.Y. Lee; C.J. Chen
21
Common-path laser linear encoder with subnanometer resolution
G.
Schitter
23
Improving the Speed of SPM by Modern Control Methods
Invited Paper
K.
Hasche;
G.
Dai;
H.-J.
Büchner, F.
Pohlenz
25
Optimized metrological scanning force microscopes
T.
Machleidt;
D.
Kapusi;
E. Sparrer;
N.
Dorozhovets; E.
Manské; K.-H. Franke
27
Navigation in large measurement
volume
by using AFM technology as
sensorsystem
in the nanopositioning and nanomeasuring machine (NPMM)
L. Yu; W. Cheng
29
Calibration of an articulated coordinate measurement machine based on an
orthogonal CMM
III
L.C.
Chen;
J.C.
Chang;
S.L.
Yeh; A.M. Tapilouw;
H.W.
Lai
31
Development of new
3-D
surface profilometry using simultaneous phase shifting
interferometry
S.
Frank;
M.
Weiß;
M.
Braunschweig;
О.
Birli 33
PC-software modules for a NPM machine control system
Ph.
Kreutzer;
R.
Füßl; R. Grünwald 35
Monte
Carlo Simulation
to determine the measurement uncertainty of metrological
models for the nanomeasuring and nanopositioning machine
Poster Session
1 :
Nanomeasuring and Nanopositioning Technology
D.
Kapusi;
T.
Machleidt;
E.
Manské;
K.-H.
Franke; R.
Jahn 37
White light
interferometry,
a new application for the nanopositioning and
nanomeasuring machine
H.-J.
Büchner;
G.
Jäger 39
Standing wave based microinterferometer
0.
Bazylevych; Yu. Hirnyak; O. Ivakhiv; M. Nakonechnyi
41
Neural controller for designing nanopositioning systems
Session
2:
Measurement and Sensor Technology
A.
Weckenmann;
P.
Krämer 45
Application of computed tomography in manufacturing metrology
Invited Paper
C.H. Liu; W.Y. Jywe; H.L Huang; I.C Chen;
Т.Н.
Hsu; Y.R. Jeng; LL. Duan; M.S. Wang
47
The application of the dual-beam laser interferometer for calibration precision
machine tools
Invited Paper
W.
Holzapfel; N.
Mahdavi 51
High precision calibration and process monitoring of modern tool machines by
inerţial
sensing
S. Kurokawa; Y. Ariura; A. Bekki; Y. Matsukawa; T.
Doi
53
Application of angle measurement with sub-micro radian resolution to detect
nanometer engagement of a gear pair
Yu. Chugui
55
High performance optical measurement systems and laser technologies for
scientific and industrial applications
Invited Paper
IV
L.C.
Chen;
Y.S.
Shu; X.L. Nguyen
57
High speed
3-D
surface profilometry using HSI color model and trapezoidal
phase-shifting method
A.
Weckenmann; J.
Bernstein
59
Optical bi-sensorial measurement system for production control of extruded profiles
N.
Dorozhovets; T. Hausotte;
E. Manske; G.
Jäger 61
Novel investigations and developments in a metrological scanning probe microscope
F. Depiereux; G.F.
Mallmann; R. Schmitt 63
Fiber optic interferometer for distance measurements: investigation of linearity
Invited Paper
W.
Schott;
W.
Pöschel;
D. Dontsov; R.
Schüler; D. Schwenk 65
Novel high precision method for Leeb hardness measurements based on laser
interferometers
J. Niehues; P.
Lehmann 67
Extended low-coherence
interferometry
for high precision microscopic form
and surface measurement
Invited Paper
R.
Hocken;
K. Desiraju
69
Accurate measurement of spheres
Invited Paper
E. Garbusi; Ch. Pruss; W.
Osten 71
Process integrated measurement of aspherical surfaces
Invited Paper
C.C. Hsu; C.C. Wu; C.J. Chen; J.Y. Lee
73
Heterodyne displacement measurement with volume hologram as reflection
type optical ruler
Y.C. Wang; L.H. Shyu; W.Y. Jywe, J.C. Lin; B.Y. Lee; Y.F.
Teng
75
Fabrication and verification of Fabry-Perot interferometer utilized for displacement
measurements
J.
Lazar;
0.
Čip; M.
Čížek;
M. Šerý
77
Interferometrie
displacement measurement for local probe microscopy
F. Fang; Z.W. Xu
79
Configuration control of carbon nanotube probe by focused ion beam
Invited Paper
Th.
Fröhlich;
Th.
Fehling;
D. Heydenbluth
81
Mass dissemination using the Sartorius mass comparator robot system
L
Krause 83
Precision vibrator for force-sensors and load-cells
S.
Mäuselein; 0.
Mack; R. Schwartz;
G.
Jäger 85
Single
crystalline sensors with thin-film strain gauges for force measurement
and weighting technology
E.
Manské;
H.
Baitinger;
R. Mastylo;
N.
Dorozhovets; S. Sinzinger; G.
Jäger 87
Investigations for the improvement of optical edge detection with a laser focus probe
E. Shi; J. Guo; Y. Huang
89
Research on a novel method for measuring volumetric error of CMM
M. Dorozhovets
91
Investigation of the test samples method, used for the evaluation of measurement
result and its uncertainty
R.
Danzi;
F. Helmli; M.
Krystek;
M. Neugebauer
93
Sphere fitting algorithms with uncertainty estimation
Poster Session
2:
Measurement and Sensor Technology
Y.J. Huang; C.J. Chen; S.H. Wang; K.Y. Tsuei; H. Baitinger; Ch. Walter
95
Dynamic structure evaluation of isolating seismic block for primary vibration
calibration system
R.
Schmitt;
К.
Vielhaber 97
Automated in-situ
interferometrie
form testing
N.
Filippov
99
About cases of necessity of quantization on geometrical progressions
0.
Ivakhiv; V. Puyda; D. Puyda
101
Analysis of
3D
surfaces by computer vision system
V. Mazin; A. Chepushtanov
103
Properties and application technology of a vector-analytical method for an
estimation of uncertainty in measurement
1. Mykytyn; B. Stadnyk; S. Yatsyshyn
105
Methodical error mathematical models of one- and two-channel noise thermometers
Ya. Lutsyk; B. Stadnyk; S. Yatsyshyn
107
Metrologie
operating characteristics of thermoelectric transducers
O. Čip; Z. Buchta; M.
Čížek;
R.
Šmíd;
J.
Lazar
109
High-resolution laser interferometer with stabilized spatial position of laser beams
N.
Hofmann;
Α.
Dunkel;
G.
Jäger;
A. Tibrewala; A. Phataralaoba; S.
Büttgenbach 111
Investigations
of the metrological characteristics of
3D
micro probes on the basis
of structured silicon-membranes
VI
J.
Wurmus;
G.
Jäger;
R.
Grunwald;
E.
Manské;
M.
Röser 113
Microoptical fibre-coupled laser
interferometers and
multiparameter
microsensor
systems for use in precision engineering
List of Authors
117
VII |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| author_GND | (DE-588)130286222 |
| author_corporate | ICPM Ilmenau |
| author_corporate_role | aut |
| author_facet | ICPM Ilmenau |
| author_sort | ICPM Ilmenau |
| building | Verbundindex |
| bvnumber | BV035091358 |
| classification_rvk | ZQ 1900 |
| classification_tum | MSR 010f |
| ctrlnum | (OCoLC)644499212 (DE-599)BVBBV035091358 |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| discipline_str_mv | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 2008 Ilmenau gnd-content |
| genre_facet | Konferenzschrift 2008 Ilmenau |
| id | DE-604.BV035091358 |
| illustrated | Illustrated |
| index_date | 2024-07-02T22:10:47Z |
| indexdate | 2024-07-09T21:22:00Z |
| institution | BVB |
| institution_GND | (DE-588)10357407-4 (DE-588)2125187-3 |
| isbn | 9783938843383 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016759469 |
| oclc_num | 644499212 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-12 DE-29T DE-706 DE-634 DE-83 DE-703 |
| owner_facet | DE-91G DE-BY-TUM DE-12 DE-29T DE-706 DE-634 DE-83 DE-703 |
| physical | VII, 120 S. Ill., graph. Darst. |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | Verl. ISLE |
| record_format | marc |
| spelling | ICPM 2008 Ilmenau Verfasser (DE-588)10357407-4 aut Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 ICPM 2008 ; [Hrsg.: Peter Scharff] Ilmenau Verl. ISLE 2008 VII, 120 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Präzisionsmessung (DE-588)4175566-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2008 Ilmenau gnd-content Präzisionsmessung (DE-588)4175566-2 s DE-604 Scharff, Peter 1957- Sonstige (DE-588)130286222 oth Technische Universität Ilmenau Sonstige (DE-588)2125187-3 oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016759469&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 Präzisionsmessung (DE-588)4175566-2 gnd |
| subject_GND | (DE-588)4175566-2 (DE-588)1071861417 |
| title | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 |
| title_auth | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 |
| title_exact_search | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 |
| title_exact_search_txtP | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 |
| title_full | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 ICPM 2008 ; [Hrsg.: Peter Scharff] |
| title_fullStr | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 ICPM 2008 ; [Hrsg.: Peter Scharff] |
| title_full_unstemmed | Proceedings 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 ICPM 2008 ; [Hrsg.: Peter Scharff] |
| title_short | Proceedings |
| title_sort | proceedings 08 12 september 2008 ilmenau university of technology international conference on precision measurement icpm 2008 |
| title_sub | 08 - 12 September 2008, Ilmenau University of Technology ; International Conference on Precision Measurement (ICPM) 2008 |
| topic | Präzisionsmessung (DE-588)4175566-2 gnd |
| topic_facet | Präzisionsmessung Konferenzschrift 2008 Ilmenau |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016759469&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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