Interaction between redox-based resistive switching mechanisms:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Jülich
Forschungszentrum Jülich, Zentralbibliothek
2012
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| Schriftenreihe: | Schriften des Forschungszentrums Jülich
Reihe Information ; 25 |
| Schlagworte: | |
| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | III, 134 S. Ill., graph. Darst. 240 mm x 170 mm |
| ISBN: | 9783893368389 |
Internformat
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Datensatz im Suchindex
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CONTENTS
CONTENTS
1 INTRODUCTION 1
1.1 STATE OF THE ART 2
1.2 SCOPE OF THIS WORK 2
2 FUNDAMENTALS 5
2.1 CURRENT MEMORY CONCEPTS 5
2.2 CURRENT NON-VOLATILE MEMORY TECHNOLOGIES 8
2.2.1 FLASH MEMORY 8
2.3 EMERGING MEMORY CONCEPTS 9
2.3.1 MAGNETORESISTIVE RAM CONCEPT 9
2.3.2 FERROELECTRIC RAM CONCEPT 9
2.3.3 PHASE CHANGE RAM CONCEPT 10
2.4 NON-VOLATILE MEMORY CONCEPTS BASED ON RESISTIVE RAM 11
2.4.1 BASIC OPERATION PRINCIPLE 11
2.4.2 CLASSIFICATION OF RESISTIVE SWITCHING MEMORY ELEMENTS 11
2.4.3 THERMOCHEMICAL MEMORY EFFECT 13
2.4.4 ELECTROCHEMICAL METALIZATION EFFECT 14
2.4.5 VALENCE CHANGE MEMORY EFFECT 15
2.4.6 TI02 MATERIAL PROPERTIES 18
3 NANO-CROSSBAR FABRICATION TECHNOLOGY 21
3.1 THIN FILM DEPOSITION 21
3.1.1 SPUTTER DEPOSITION 21
/ 3.1.2 E-BEAM EVAPORATION 22
3.2 LITHOGRAPHY 23
3.2.1 OPTICAL LITHOGRAPHY 23
3.2.2 E-BEAM LITHOGRAPHY 24
3.2.3 NANOIMPRINT LITHOGRAPHY 25
3.3 DEVICE FABRICATION 26
3.3.1 PASSIVE NANO-CROSSBAR MEMORY ELEMENTS 26
3.3.2 CMOS COMPATIBLE MEMORY ELEMENTS WITH W ELECTRODES 27
3.3.3 INTEGRATED 1T1R MEMORY DEVICES 29
3.4 STRUCTURAL ANALYSIS OF RR AM DEVICES 29
3.4.1 SCANNING ELECTRON MICROSCOPY 32
3.4.2 HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY 32
HTTP://D-NB.INFO/1031730486
CONTENTS
4 ADVANCED SETUP FOR ELECTRICAL CHARACTERIZATION 35
4.1 CHALLENGES OF RRAM CHARACTERIZATION 3-5
4.2 MEASUREMENT PROCEDURES 36
4.2.1 ELECTRICAL PARAMETERS OF RRAM DEVICES 36
4.2.2 READ DISTURB 37
4.2.3 RETENTION 39
4.2.4 DISTURB BY CUMULATIVE PULSE TRAINS 40
4.2.5 SWITCHING KINETICS 40
4.2.6 MEASUREMENT TECHNOLOGY 42
4.3 MEASUREMENT SETUP 50
4.3.1 FAST PULSE MEASUREMENT SETUP 50
4.3.2 QUASI-STATIC MEASUREMENT SYSTEM 53
5 RESISTIVE SWITCHING IN SRTIOS BASED MEMORY ELEMENTS 57
5.1 SAMPLE PREPARATION 57
5.1.1 PULSED LASER DEPOSITION 58
5.2 QUASI-STATIC ELECTRICAL CHARACTERISTICS 59
5.2.1 QUASI-STATIC PROPERTIES 60
5.2.2 RETENTION 61
5.2.3 MULTI LEVEL STORAGE 61
5.3 FAST PULSE CHARACTERIZATION 62
5.3.1 SWITCHING KINETICS 62
*5.3.2 FAST PULSE INDUCED MULTI LEVEL STORAGE 64
5.3.3 PULSE READ DISTURB 64
6 RESISTIVE SWITCHING IN TI02 BASED MEMORY ELEMENTS 67
6.1 QUASI-STATIC ELECTRICAL CHARACTERIZATION 67
6.2 ELECTROFORMING 69
6.2.1 STRUCTURAL IMPACT OF ELECTROFORMING 69
6.2.2 CROSS-SECTIONAL SEM AND TEM 71
6.2.3 FORMING-FREE RRAM MEMORY ELEMENTS BY INTERFACE ENGINEERING . . 75
6.3^FAST PULSE CHARACTERIZATION 86
6.3.1 FAST VOLTAGE PULSE ELECTROFORMING 86
6.3.2 FAST PULSE DATA OPERATION 88
7 RESISTIVE SWITCHING IN TIC
2
BASED RRAM DEVICES WITH A SELECT DEVICELOL
7.1 TRANSISTOR CHARACTERIZATION 101
7.2 RESISTIVE MEMORY ELEMENT CHARACTERIZATION 103
7.3 1T1R MEMORY DEVICE CHARACTERIZATION 103
7.3.1 QUASI-STATIC CHARACTERIZATION 103
7.3.2 FAST PULSE CHARACTERIZATION 105
8 CONCLUSIONS AND OUTLOOK 111
8.1 MEASUREMENT TECHNOLOGY IMPROVEMENT, ILL
8.2 RESISTIVE SWITCHING IN SRTI03 112
II
CONTENTS
8.3 RESISTIVE SWITCHING IN TIC
2
112
8.4 OUTLOOK 114
BIBLIOGRAPHY 123
III |
| any_adam_object | 1 |
| author | Hermes, Christoph Rudolf |
| author_GND | (DE-588)103130228X |
| author_facet | Hermes, Christoph Rudolf |
| author_role | aut |
| author_sort | Hermes, Christoph Rudolf |
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| bvnumber | BV040970361 |
| ctrlnum | (OCoLC)864643627 (DE-599)DNB1031730486 |
| dewey-full | 621.39732 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.39732 |
| dewey-search | 621.39732 |
| dewey-sort | 3621.39732 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Allgemeine Naturwissenschaft Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| indexdate | 2024-09-10T00:57:23Z |
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| isbn | 9783893368389 |
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| physical | III, 134 S. Ill., graph. Darst. 240 mm x 170 mm |
| publishDate | 2012 |
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| publisher | Forschungszentrum Jülich, Zentralbibliothek |
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| series | Schriften des Forschungszentrums Jülich |
| series2 | Schriften des Forschungszentrums Jülich : Reihe Information |
| spelling | Hermes, Christoph Rudolf Verfasser (DE-588)103130228X aut Interaction between redox-based resistive switching mechanisms Christoph Rudolf Hermes Jülich Forschungszentrum Jülich, Zentralbibliothek 2012 III, 134 S. Ill., graph. Darst. 240 mm x 170 mm txt rdacontent n rdamedia nc rdacarrier Schriften des Forschungszentrums Jülich : Reihe Information 25 Zugl.: Aachen, RWTH, Diss., 2012 (DE-588)4113937-9 Hochschulschrift gnd-content Schriften des Forschungszentrums Jülich Reihe Information ; 25 (DE-604)BV035800087 25 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4261031&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025948557&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Hermes, Christoph Rudolf Interaction between redox-based resistive switching mechanisms Schriften des Forschungszentrums Jülich |
| subject_GND | (DE-588)4113937-9 |
| title | Interaction between redox-based resistive switching mechanisms |
| title_auth | Interaction between redox-based resistive switching mechanisms |
| title_exact_search | Interaction between redox-based resistive switching mechanisms |
| title_full | Interaction between redox-based resistive switching mechanisms Christoph Rudolf Hermes |
| title_fullStr | Interaction between redox-based resistive switching mechanisms Christoph Rudolf Hermes |
| title_full_unstemmed | Interaction between redox-based resistive switching mechanisms Christoph Rudolf Hermes |
| title_short | Interaction between redox-based resistive switching mechanisms |
| title_sort | interaction between redox based resistive switching mechanisms |
| topic_facet | Hochschulschrift |
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