Micro and nano fabrication: tools and processes
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
[2015]
|
| Schlagworte: | |
| Online-Zugang: | BHS01 BTU01 FAB01 FAW01 FHA01 FHI01 FHN01 FHR01 FKE01 FRO01 FWS01 FWS02 UBY01 Volltext Inhaltsverzeichnis Abstract |
| Beschreibung: | 1 Online-Ressource (XXVI, 519 Seiten) Illustrationen |
| ISBN: | 9783662443958 |
| DOI: | 10.1007/978-3-662-44395-8 |
Internformat
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Datensatz im Suchindex
| DE-BY-FWS_katkey | 545507 |
|---|---|
| _version_ | 1806179216197156864 |
| adam_text | MICRO AND NANO FABRICATION
/ GATZEN, HANS H.
: 2015
TABLE OF CONTENTS / INHALTSVERZEICHNIS
INTRODUCTION-MEMS, A HISTORICAL PERSPECTIVE
VACUUM TECHNOLOGY
DEPOSITION TECHNOLOGIES
ETCHING TECHNOLOGIES
DOPING AND SURFACE MODIFICATION
LITHOGRAPHY
LIGA
NANOFABRICATION BY SELF-ASSEMBLY
ENABLING TECHNOLOGIES I - WAFER PLANARIZATION AND BONDING
ENABLING TECHNOLOGIES II - CONTAMINATION CONTROL
DEVICE FABRICATION - AN EXAMPLE
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
MICRO AND NANO FABRICATION
/ GATZEN, HANS H.
: 2015
ABSTRACT / INHALTSTEXT
FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) AND NANOELECTROMECHANICAL
SYSTEMS (NEMS) PRODUCTION, EACH PRODUCT REQUIRES A UNIQUE PROCESS
TECHNOLOGY. THIS BOOK PROVIDES A COMPREHENSIVE INSIGHT INTO THE TOOLS
NECESSARY FOR FABRICATING MEMS/NEMS AND THE PROCESS TECHNOLOGIES
APPLIED. BESIDES, IT DESCRIBES ENABLING TECHNOLOGIES WHICH ARE NECESSARY
FOR A SUCCESSFUL PRODUCTION, I.E., WAFER PLANARIZATION AND BONDING, AS
WELL AS CONTAMINATION CONTROL
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
|
| any_adam_object | 1 |
| author | Gatzen, Hans-Heinrich 1943- |
| author_GND | (DE-588)106837733X (DE-588)109547268 (DE-588)121432238 |
| author_facet | Gatzen, Hans-Heinrich 1943- |
| author_role | aut |
| author_sort | Gatzen, Hans-Heinrich 1943- |
| author_variant | h h g hhg |
| building | Verbundindex |
| bvnumber | BV042326290 |
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| ctrlnum | (OCoLC)902846289 (DE-599)BVBBV042326290 |
| dewey-full | 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-3-662-44395-8 |
| format | Electronic eBook |
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| institution | BVB |
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| language | English |
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| publisher | Springer |
| record_format | marc |
| spellingShingle | Gatzen, Hans-Heinrich 1943- Micro and nano fabrication tools and processes Engineering Machinery Structural control (Engineering) Nanotechnology and Microengineering Manufacturing, Machines, Tools Operating Procedures, Materials Treatment Ingenieurwissenschaften Nanotechnologie (DE-588)4327470-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Nanoelektromechanik (DE-588)7546434-2 gnd MEMS (DE-588)4824724-8 gnd Mikrofertigung (DE-588)7523640-0 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4136339-5 (DE-588)7546434-2 (DE-588)4824724-8 (DE-588)7523640-0 (DE-588)4221617-5 |
| title | Micro and nano fabrication tools and processes |
| title_auth | Micro and nano fabrication tools and processes |
| title_exact_search | Micro and nano fabrication tools and processes |
| title_full | Micro and nano fabrication tools and processes Hans H. Gatzen ; Volker Saile ; Jürg Leuthold |
| title_fullStr | Micro and nano fabrication tools and processes Hans H. Gatzen ; Volker Saile ; Jürg Leuthold |
| title_full_unstemmed | Micro and nano fabrication tools and processes Hans H. Gatzen ; Volker Saile ; Jürg Leuthold |
| title_short | Micro and nano fabrication |
| title_sort | micro and nano fabrication tools and processes |
| title_sub | tools and processes |
| topic | Engineering Machinery Structural control (Engineering) Nanotechnology and Microengineering Manufacturing, Machines, Tools Operating Procedures, Materials Treatment Ingenieurwissenschaften Nanotechnologie (DE-588)4327470-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Nanoelektromechanik (DE-588)7546434-2 gnd MEMS (DE-588)4824724-8 gnd Mikrofertigung (DE-588)7523640-0 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Engineering Machinery Structural control (Engineering) Nanotechnology and Microengineering Manufacturing, Machines, Tools Operating Procedures, Materials Treatment Ingenieurwissenschaften Nanotechnologie Dünnschichttechnik Nanoelektromechanik MEMS Mikrofertigung Mikrosystemtechnik |
| url | https://doi.org/10.1007/978-3-662-44395-8 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027763127&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027763127&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT gatzenhansheinrich microandnanofabricationtoolsandprocesses AT sailevolker microandnanofabricationtoolsandprocesses AT leutholdjuerg microandnanofabricationtoolsandprocesses |