Symposium: held November 28 - 30, 1994, Boston, Massachusetts, USA
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Bibliographic Details
Corporate Author: Symposium on Chemical Vapor Deposition of Refractory Metals and Ceramics Boston, Mass (Author)
Other Authors: Gallois, Bernard M. (Editor)
Format: Conference Proceeding Book
Language:Undetermined
Published: Pittsburgh, Pa. MRS 1995
Series:Materials Research Society symposium proceedings 363 : Chemical vapor deposition of refractory metals and ceramics ; 3
Materials Research Society symposium proceedings 363
Subjects:
Physical Description:XI, 284 S. Ill., graph. Darst.
ISBN:1558992642

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