Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication: May 29 - June 1, 2012, Waikoloa, HI
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Inst. of Physics
2012
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| Schriftenreihe: | Journal of vacuum science & technology : B, Nanotechnology & microelectronics
30,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | Getr. Zählung graph. Darst. |
| ISBN: | 9780983693314 |
Internformat
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| 245 | 1 | 0 | |a Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication |b May 29 - June 1, 2012, Waikoloa, HI |c conference chair: Reginald Farrow |
| 264 | 1 | |a New York, NY |b American Inst. of Physics |c 2012 | |
| 300 | |a Getr. Zählung |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology : B, Nanotechnology & microelectronics |v 30,6 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes | ||
| 650 | 0 | 7 | |a Nanostrukturiertes Material |0 (DE-588)4342626-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanoelektronik |0 (DE-588)4732034-5 |2 gnd |9 rswk-swf |
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| 689 | 0 | 2 | |a Nanoelektronik |0 (DE-588)4732034-5 |D s |
| 689 | 0 | 3 | |a Teilchenstrahl |0 (DE-588)4165339-7 |D s |
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Datensatz im Suchindex
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| building | Verbundindex |
| bvnumber | BV040669189 |
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| id | DE-604.BV040669189 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:28:43Z |
| institution | BVB |
| institution_GND | (DE-588)1029673748 |
| isbn | 9780983693314 |
| language | English |
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| physical | Getr. Zählung graph. Darst. |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : B, Nanotechnology & microelectronics |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 56. 2012 Waikoloa, Hawaii Verfasser (DE-588)1029673748 aut Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI conference chair: Reginald Farrow New York, NY American Inst. of Physics 2012 Getr. Zählung graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B, Nanotechnology & microelectronics 30,6 Einzelaufnahme eines Zeitschr.-Heftes Nanostrukturiertes Material (DE-588)4342626-8 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanoelektronik (DE-588)4732034-5 gnd rswk-swf Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2012 Waikoloa, Hawaii gnd-content Nanotechnologie (DE-588)4327470-5 s Nanostrukturiertes Material (DE-588)4342626-8 s Nanoelektronik (DE-588)4732034-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Farrow, Reginald edt |
| spellingShingle | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI Nanostrukturiertes Material (DE-588)4342626-8 gnd Nanotechnologie (DE-588)4327470-5 gnd Nanoelektronik (DE-588)4732034-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| subject_GND | (DE-588)4342626-8 (DE-588)4327470-5 (DE-588)4732034-5 (DE-588)4165339-7 (DE-588)1071861417 |
| title | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI |
| title_auth | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI |
| title_exact_search | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI |
| title_full | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI conference chair: Reginald Farrow |
| title_fullStr | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI conference chair: Reginald Farrow |
| title_full_unstemmed | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication May 29 - June 1, 2012, Waikoloa, HI conference chair: Reginald Farrow |
| title_short | Papers from the 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 56th international conference on electron ion and photon beam technology and nanofabrication may 29 june 1 2012 waikoloa hi |
| title_sub | May 29 - June 1, 2012, Waikoloa, HI |
| topic | Nanostrukturiertes Material (DE-588)4342626-8 gnd Nanotechnologie (DE-588)4327470-5 gnd Nanoelektronik (DE-588)4732034-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| topic_facet | Nanostrukturiertes Material Nanotechnologie Nanoelektronik Teilchenstrahl Konferenzschrift 2012 Waikoloa, Hawaii |
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