Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | German |
| Veröffentlicht: |
2010
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| Schlagworte: | |
| Beschreibung: | VI, 151 S. graph. Darst. |
Internformat
MARC
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| 100 | 1 | |a Fabel, Bernhard |e Verfasser |0 (DE-588)143453505 |4 aut | |
| 245 | 1 | 0 | |a Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika |c Bernhard Fabel |
| 264 | 1 | |c 2010 | |
| 300 | |a VI, 151 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 338 | |b nc |2 rdacarrier | ||
| 502 | |a München, Techn. Univ., Diss., 2010 | ||
| 650 | 0 | 7 | |a Dielektrikum |0 (DE-588)4149716-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Monoschicht |0 (DE-588)4250307-3 |2 gnd |9 rswk-swf |
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| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Fabel, Bernhard |
| author_GND | (DE-588)143453505 |
| author_facet | Fabel, Bernhard |
| author_role | aut |
| author_sort | Fabel, Bernhard |
| author_variant | b f bf |
| building | Verbundindex |
| bvnumber | BV037223865 |
| ctrlnum | (OCoLC)711821745 (DE-599)BVBBV037223865 |
| format | Thesis Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T22:53:49Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-021137692 |
| oclc_num | 711821745 |
| open_access_boolean | |
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| owner_facet | DE-91 DE-BY-TUM DE-12 DE-706 DE-83 DE-29T |
| physical | VI, 151 S. graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
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| spelling | Fabel, Bernhard Verfasser (DE-588)143453505 aut Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika Bernhard Fabel 2010 VI, 151 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier München, Techn. Univ., Diss., 2010 Dielektrikum (DE-588)4149716-8 gnd rswk-swf Monoschicht (DE-588)4250307-3 gnd rswk-swf MOS (DE-588)4130209-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Dielektrikum (DE-588)4149716-8 s MOS (DE-588)4130209-6 s Monoschicht (DE-588)4250307-3 s DE-604 |
| spellingShingle | Fabel, Bernhard Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika Dielektrikum (DE-588)4149716-8 gnd Monoschicht (DE-588)4250307-3 gnd MOS (DE-588)4130209-6 gnd |
| subject_GND | (DE-588)4149716-8 (DE-588)4250307-3 (DE-588)4130209-6 (DE-588)4113937-9 |
| title | Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika |
| title_auth | Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika |
| title_exact_search | Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika |
| title_full | Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika Bernhard Fabel |
| title_fullStr | Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika Bernhard Fabel |
| title_full_unstemmed | Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika Bernhard Fabel |
| title_short | Gate Stack Engineering mit atomar selbstlimitierenden Dielektrika |
| title_sort | gate stack engineering mit atomar selbstlimitierenden dielektrika |
| topic | Dielektrikum (DE-588)4149716-8 gnd Monoschicht (DE-588)4250307-3 gnd MOS (DE-588)4130209-6 gnd |
| topic_facet | Dielektrikum Monoschicht MOS Hochschulschrift |
| work_keys_str_mv | AT fabelbernhard gatestackengineeringmitatomarselbstlimitierendendielektrika |