Symposium: held April 25 - 27, 2000, San Francisco, California, USA
Gespeichert in:
Körperschaft: | |
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Weitere Verfasser: | |
Format: | Tagungsbericht Buch |
Sprache: | English |
Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2001
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Schriftenreihe: | Materials Research Society symposium proceedings
611 : Gate stack and silicide issues in silicon processing ; [1] Materials Research Society symposium proceedings 611 |
Schlagworte: | |
Beschreibung: | Getr. Zählung Ill., graph. Darst. |
ISBN: | 1558995196 |
Internformat
MARC
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245 | 1 | 0 | |a Symposium |b held April 25 - 27, 2000, San Francisco, California, USA |c [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing" ; ed.: L. A. Clevenger ... |
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490 | 1 | |a Materials Research Society symposium proceedings |v 611 : Gate stack and silicide issues in silicon processing |v [1] | |
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700 | 1 | |a Clevenger, Larry A. |4 edt | |
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Datensatz im Suchindex
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any_adam_object | |
author2 | Clevenger, Larry A. |
author2_role | edt |
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author_corporate | Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing San Francisco, Calif |
author_corporate_role | aut |
author_facet | Clevenger, Larry A. Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing San Francisco, Calif |
author_sort | Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing San Francisco, Calif |
building | Verbundindex |
bvnumber | BV024486974 |
classification_rvk | UD 8400 |
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discipline | Physik |
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institution | BVB |
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isbn | 1558995196 |
language | English |
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physical | Getr. Zählung Ill., graph. Darst. |
publishDate | 2001 |
publishDateSearch | 2001 |
publishDateSort | 2001 |
publisher | Materials Research Soc. |
record_format | marc |
series | Materials Research Society symposium proceedings |
series2 | Materials Research Society symposium proceedings |
spelling | Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing 2000 San Francisco, Calif. Verfasser (DE-588)6030985-4 aut Symposium held April 25 - 27, 2000, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing" ; ed.: L. A. Clevenger ... Warrendale, Pa. Materials Research Soc. 2001 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 611 : Gate stack and silicide issues in silicon processing [1] Materials Research Society symposium proceedings 611 (DE-588)1071861417 Konferenzschrift gnd-content Clevenger, Larry A. edt Materials Research Society symposium proceedings 611 : Gate stack and silicide issues in silicon processing ; [1] (DE-604)BV024495989 1 Materials Research Society symposium proceedings 611 (DE-604)BV001899105 611 |
spellingShingle | Symposium held April 25 - 27, 2000, San Francisco, California, USA Materials Research Society symposium proceedings |
subject_GND | (DE-588)1071861417 |
title | Symposium held April 25 - 27, 2000, San Francisco, California, USA |
title_auth | Symposium held April 25 - 27, 2000, San Francisco, California, USA |
title_exact_search | Symposium held April 25 - 27, 2000, San Francisco, California, USA |
title_full | Symposium held April 25 - 27, 2000, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing" ; ed.: L. A. Clevenger ... |
title_fullStr | Symposium held April 25 - 27, 2000, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing" ; ed.: L. A. Clevenger ... |
title_full_unstemmed | Symposium held April 25 - 27, 2000, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing" ; ed.: L. A. Clevenger ... |
title_short | Symposium |
title_sort | symposium held april 25 27 2000 san francisco california usa |
title_sub | held April 25 - 27, 2000, San Francisco, California, USA |
topic_facet | Konferenzschrift |
volume_link | (DE-604)BV024495989 (DE-604)BV001899105 |
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