Understanding MEMS: principles and applications
Gespeichert in:
1. Verfasser: | |
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Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Chichester
Wiley
2016
|
Schlagworte: | |
Online-Zugang: | Inhaltsverzeichnis |
Beschreibung: | Includes bibliographical references and index |
Beschreibung: | XIV, 314 Seiten Illustrationen, Diagramme |
ISBN: | 9781119055426 |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV043401969 | ||
003 | DE-604 | ||
005 | 20170207 | ||
007 | t | ||
008 | 160223s2016 xxka||| |||| 00||| eng d | ||
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035 | |a (OCoLC)935891847 | ||
035 | |a (DE-599)BVBBV043401969 | ||
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041 | 0 | |a eng | |
044 | |a xxk |c GB | ||
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245 | 1 | 0 | |a Understanding MEMS |b principles and applications |c Luis Castañer |
264 | 1 | |a Chichester |b Wiley |c 2016 | |
300 | |a XIV, 314 Seiten |b Illustrationen, Diagramme | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Includes bibliographical references and index | ||
650 | 4 | |a Microelectromechanical systems | |
650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Elektromechanik |0 (DE-588)4151846-9 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
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689 | 1 | |5 DE-604 | |
689 | 2 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
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999 | |a oai:aleph.bib-bvb.de:BVB01-028820459 |
Datensatz im Suchindex
_version_ | 1804175986305007616 |
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adam_text | UNDERSTANDING MEMS
/ CASTANER, LUIS [AUTHOR.]
: 2015
TABLE OF CONTENTS / INHALTSVERZEICHNIS
SCALING OF FORCES
ELASTICITY
BENDING OF MICROSTRUCTURES
PIEZORESISTANCE AND PIEZOELECTRICITY
ELECTROSTATIC DRIVING AND SENSING
RESONATORS
MICROFLUIDICS AND ELECTROKINETICS
THERMAL DEVICES
FABRICATION
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
|
any_adam_object | 1 |
author | Castañer, Luis 1948- |
author_GND | (DE-588)1100320792 |
author_facet | Castañer, Luis 1948- |
author_role | aut |
author_sort | Castañer, Luis 1948- |
author_variant | l c lc |
building | Verbundindex |
bvnumber | BV043401969 |
classification_rvk | ZN 3750 |
ctrlnum | (OCoLC)935891847 (DE-599)BVBBV043401969 |
dewey-full | 621.381 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.381 |
dewey-search | 621.381 |
dewey-sort | 3621.381 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
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id | DE-604.BV043401969 |
illustrated | Illustrated |
indexdate | 2024-07-10T07:25:00Z |
institution | BVB |
isbn | 9781119055426 |
language | English |
lccn | 015024280 |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028820459 |
oclc_num | 935891847 |
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owner | DE-634 DE-703 |
owner_facet | DE-634 DE-703 |
physical | XIV, 314 Seiten Illustrationen, Diagramme |
publishDate | 2016 |
publishDateSearch | 2016 |
publishDateSort | 2016 |
publisher | Wiley |
record_format | marc |
spelling | Castañer, Luis 1948- Verfasser (DE-588)1100320792 aut Understanding MEMS principles and applications Luis Castañer Chichester Wiley 2016 XIV, 314 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Microelectromechanical systems Mikromechanik (DE-588)4205811-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Elektromechanik (DE-588)4151846-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf MEMS (DE-588)4824724-8 s DE-604 Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s Mikrosystemtechnik (DE-588)4221617-5 s Elektromechanik (DE-588)4151846-9 s LoC Fremddatenuebernahme application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028820459&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Castañer, Luis 1948- Understanding MEMS principles and applications Microelectromechanical systems Mikromechanik (DE-588)4205811-9 gnd MEMS (DE-588)4824724-8 gnd Elektromechanik (DE-588)4151846-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
subject_GND | (DE-588)4205811-9 (DE-588)4824724-8 (DE-588)4151846-9 (DE-588)4039207-7 (DE-588)4221617-5 |
title | Understanding MEMS principles and applications |
title_auth | Understanding MEMS principles and applications |
title_exact_search | Understanding MEMS principles and applications |
title_full | Understanding MEMS principles and applications Luis Castañer |
title_fullStr | Understanding MEMS principles and applications Luis Castañer |
title_full_unstemmed | Understanding MEMS principles and applications Luis Castañer |
title_short | Understanding MEMS |
title_sort | understanding mems principles and applications |
title_sub | principles and applications |
topic | Microelectromechanical systems Mikromechanik (DE-588)4205811-9 gnd MEMS (DE-588)4824724-8 gnd Elektromechanik (DE-588)4151846-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
topic_facet | Microelectromechanical systems Mikromechanik MEMS Elektromechanik Mikroelektronik Mikrosystemtechnik |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028820459&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
work_keys_str_mv | AT castanerluis understandingmemsprinciplesandapplications |