Fabrication of GaAs devices:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
London
Institution of Electrical Engineers
©2005
|
| Series: | EMIS processing series
no. 6 |
| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Includes bibliographical references and index Acknowledgment; Abbreviations; 1. Introduction to GaAs devices; 2. Semiconductor properties, growth, characterisation and processing techniques; 3. Cleaning and passivation of GaAs and related alloys; 4. Wet etching and photolithography of GaAs and related alloys; 5. Dry etching of GaAs and related alloys; 6. Ohmic contacts; 7. Schottky contacts; 8. Field effect transistors; 9. Heterojunction bipolar transistors; 10. Wet oxidation for optoelectronic and MIS GaAs devices; Glossary; Index This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices |
| Physical Description: | 1 Online-Ressource (xvii, 350 pages) |
| ISBN: | 0863413536 1849190682 9781849190688 |
Staff View
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| 264 | 1 | |a London |b Institution of Electrical Engineers |c ©2005 | |
| 300 | |a 1 Online-Ressource (xvii, 350 pages) | ||
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| 490 | 0 | |a EMIS processing series |v no. 6 | |
| 500 | |a Includes bibliographical references and index | ||
| 500 | |a Acknowledgment; Abbreviations; 1. Introduction to GaAs devices; 2. Semiconductor properties, growth, characterisation and processing techniques; 3. Cleaning and passivation of GaAs and related alloys; 4. Wet etching and photolithography of GaAs and related alloys; 5. Dry etching of GaAs and related alloys; 6. Ohmic contacts; 7. Schottky contacts; 8. Field effect transistors; 9. Heterojunction bipolar transistors; 10. Wet oxidation for optoelectronic and MIS GaAs devices; Glossary; Index | ||
| 500 | |a This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices | ||
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| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Semiconductors |2 bisacsh | |
| 650 | 7 | |a Gallium arsenide semiconductors |2 fast | |
| 650 | 4 | |a Gallium arsenide semiconductors | |
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| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043098770 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:17:22Z |
| institution | BVB |
| isbn | 0863413536 1849190682 9781849190688 |
| language | English |
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| physical | 1 Online-Ressource (xvii, 350 pages) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Institution of Electrical Engineers |
| record_format | marc |
| series2 | EMIS processing series |
| spelling | Baca, A. G. Verfasser aut Fabrication of GaAs devices by Albert G. Baca and Carol I.H. Ashby London Institution of Electrical Engineers ©2005 1 Online-Ressource (xvii, 350 pages) txt rdacontent c rdamedia cr rdacarrier EMIS processing series no. 6 Includes bibliographical references and index Acknowledgment; Abbreviations; 1. Introduction to GaAs devices; 2. Semiconductor properties, growth, characterisation and processing techniques; 3. Cleaning and passivation of GaAs and related alloys; 4. Wet etching and photolithography of GaAs and related alloys; 5. Dry etching of GaAs and related alloys; 6. Ohmic contacts; 7. Schottky contacts; 8. Field effect transistors; 9. Heterojunction bipolar transistors; 10. Wet oxidation for optoelectronic and MIS GaAs devices; Glossary; Index This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Gallium arsenide semiconductors fast Gallium arsenide semiconductors Ashby, Carol Iris Hill Sonstige oth Institution of Electrical Engineers Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=292236 Aggregator Volltext |
| spellingShingle | Baca, A. G. Fabrication of GaAs devices TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Gallium arsenide semiconductors fast Gallium arsenide semiconductors |
| title | Fabrication of GaAs devices |
| title_auth | Fabrication of GaAs devices |
| title_exact_search | Fabrication of GaAs devices |
| title_full | Fabrication of GaAs devices by Albert G. Baca and Carol I.H. Ashby |
| title_fullStr | Fabrication of GaAs devices by Albert G. Baca and Carol I.H. Ashby |
| title_full_unstemmed | Fabrication of GaAs devices by Albert G. Baca and Carol I.H. Ashby |
| title_short | Fabrication of GaAs devices |
| title_sort | fabrication of gaas devices |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Gallium arsenide semiconductors fast Gallium arsenide semiconductors |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Solid State TECHNOLOGY & ENGINEERING / Electronics / Semiconductors Gallium arsenide semiconductors |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=292236 |
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