Wafer fabrication: factory performance and analysis
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boston [u.a.]
Kluwer
1995
|
| Schriftenreihe: | The Kluwer international series in engineering and computer science
339 |
| Schlagworte: | |
| Beschreibung: | XIX, 468 S. graph. Darst. |
| ISBN: | 0792396197 |
Internformat
MARC
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| 003 | DE-604 | ||
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| 035 | |a (OCoLC)33079151 | ||
| 035 | |a (DE-599)BVBBV010901334 | ||
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| 100 | 1 | |a Atherton, Linda F. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Wafer fabrication |b factory performance and analysis |c Linda F. Atherton ; Robert W. Atherton |
| 264 | 1 | |a Boston [u.a.] |b Kluwer |c 1995 | |
| 300 | |a XIX, 468 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a The Kluwer international series in engineering and computer science |v 339 | |
| 650 | 4 | |a Factory management | |
| 650 | 4 | |a Semiconductor wafers |x Design and construction | |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Wafer |0 (DE-588)4294605-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Wafer |0 (DE-588)4294605-0 |D s |
| 689 | 0 | 1 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Atherton, Robert W. |e Verfasser |4 aut | |
| 830 | 0 | |a The Kluwer international series in engineering and computer science |v 339 |w (DE-604)BV023545171 |9 339 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007291023 | ||
Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Atherton, Linda F. Atherton, Robert W. |
| author_facet | Atherton, Linda F. Atherton, Robert W. |
| author_role | aut aut |
| author_sort | Atherton, Linda F. |
| author_variant | l f a lf lfa r w a rw rwa |
| building | Verbundindex |
| bvnumber | BV010901334 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 3100 |
| ctrlnum | (OCoLC)33079151 (DE-599)BVBBV010901334 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV010901334 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:00:50Z |
| institution | BVB |
| isbn | 0792396197 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007291023 |
| oclc_num | 33079151 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XIX, 468 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Kluwer |
| record_format | marc |
| series | The Kluwer international series in engineering and computer science |
| series2 | The Kluwer international series in engineering and computer science |
| spelling | Atherton, Linda F. Verfasser aut Wafer fabrication factory performance and analysis Linda F. Atherton ; Robert W. Atherton Boston [u.a.] Kluwer 1995 XIX, 468 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier The Kluwer international series in engineering and computer science 339 Factory management Semiconductor wafers Design and construction Fertigung (DE-588)4016899-2 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf Wafer (DE-588)4294605-0 s Fertigung (DE-588)4016899-2 s DE-604 Atherton, Robert W. Verfasser aut The Kluwer international series in engineering and computer science 339 (DE-604)BV023545171 339 |
| spellingShingle | Atherton, Linda F. Atherton, Robert W. Wafer fabrication factory performance and analysis The Kluwer international series in engineering and computer science Factory management Semiconductor wafers Design and construction Fertigung (DE-588)4016899-2 gnd Wafer (DE-588)4294605-0 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4294605-0 |
| title | Wafer fabrication factory performance and analysis |
| title_auth | Wafer fabrication factory performance and analysis |
| title_exact_search | Wafer fabrication factory performance and analysis |
| title_full | Wafer fabrication factory performance and analysis Linda F. Atherton ; Robert W. Atherton |
| title_fullStr | Wafer fabrication factory performance and analysis Linda F. Atherton ; Robert W. Atherton |
| title_full_unstemmed | Wafer fabrication factory performance and analysis Linda F. Atherton ; Robert W. Atherton |
| title_short | Wafer fabrication |
| title_sort | wafer fabrication factory performance and analysis |
| title_sub | factory performance and analysis |
| topic | Factory management Semiconductor wafers Design and construction Fertigung (DE-588)4016899-2 gnd Wafer (DE-588)4294605-0 gnd |
| topic_facet | Factory management Semiconductor wafers Design and construction Fertigung Wafer |
| volume_link | (DE-604)BV023545171 |
| work_keys_str_mv | AT athertonlindaf waferfabricationfactoryperformanceandanalysis AT athertonrobertw waferfabricationfactoryperformanceandanalysis |